SECS/GEM Drive
时间: 2023-09-02 16:06:04 浏览: 145
SECS/GEM是一种用于半导体设备之间通信的标准。SECS/GEM Drive是指用于实现SECS/GEM通信协议的驱动程序。用户可以根据需要进行SECS编码的设计,并使用SECS Driver提供的接口来编辑SECS编码。使用SECS库时,可以创建一个SECS对象,并设置通信参数及建立通信连接。在SECS/GEM通信中,通信状态可以分为eSecsStateDisconnect、eSecsStateListen、eSecsStateConnect和eSecsStateEnsureComm等几种状态。<span class="em">1</span><span class="em">2</span><span class="em">3</span>
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