请解释Infiltrating lithography
时间: 2023-12-05 16:05:01 浏览: 18
Infiltrating lithography是一种使用高分子材料来填充微细孔,以制造纳米结构的技术。该技术利用纳米孔道作为模板,将高分子材料注入其中,然后通过热处理将其凝固,最终形成所需的纳米结构。这种方法可以在不需要使用昂贵的光刻设备的情况下制造出高精度的纳米结构,因此在纳米科技领域被广泛应用。
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