请翻译:The fabrication process of inverted pyramids on Si surface involved two steps, i.e., diamond tip indentation and selective etching in HF/ HNO3 mixtures. Consider the fabrication process for the inverted triangular pyramids as an example, as demonstrated in Fig. 1a. First, a Berkovich diamond indenter was used for conducting indentation process on an in-situ nanomechanical test system (TI750, Hysitron Inc., USA). Then, the Si wafers with indents were immersed in a mixture of HF and HNO3 solution. As a result, the depth of the indent rapidly increased from ~ 30 to 360 nm after the etching in HF/HNO3 mixtures for 10 s, forming inverted pyramids from indented regions in situ. To demonstrate fabrication flexibility of inverted Si architecture produced by the proposed selective etching, indentation experiments were carried out using a Vickers indenter
时间: 2023-03-06 11:58:07 浏览: 351
用Berkovich金刚石入射器在原位纳米力学测试系统(TI750,Hysitron Inc.,美国)上进行入射过程,然后将入射后的硅片浸入HF和HNO3混合液中。结果,在HF/HNO3混合液中腐蚀10 s后,入射处的深度会从~ 30 nm迅速增加到360 nm,形成入射处的倒三角形金字塔。为了证明所提出的选择性腐蚀制备的倒置Si结构的灵活性,使用Vickers入射器进行了入射实验。
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