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SEMI E94-1000 © SEMI 20005
only the interface is standardized, it is not a requirement
for equipment to implement a control job object, it is
only required that the equipment provide an external
interface that provides the services and behavior
defined for the ControlJob.
8.2 Material to Job Linkage
8.2.1 The equipment has relationshi ps with many
other components not illustrated in Figure 1. In partic-
ular, from its knowledge based on substrate and carrier
tracking capabilities, the equipment shall connect the
process job material list to the materials in the carriers
that it has. It is the responsibility of the factory host to
make sure that the description or identifiers of material
contained in carriers can be mapped to the material
identifiers in the process job definition.
8.3 Control Jobs and Carriers
8.3.1 A control job may specify wor k for several
carriers. The supplier shall document the behavior of
the equipment in the case where a carrier is specified
for use in more than one control job.
8.4 Attribute Definitions
8.4.1 The attributes in Table 1 shall be accessible
using the Object Services standard (SEMI E39). Object
services is a set of messages which may be required of
any service provider which is modeled by objects. An
object model for a service provides a consistent naming
convention for exchanging information between the
service provider and user. Object services
implementations shall be consistent with the service’s
object and state models. For instance, if an attribute
can only be modified in a certain state, then a request to
set that attribute when the model is in the wrong state
shall be rejected (fail). ControlJob Attributes shall be
modifiable if and only if the ControlJob is not in either
the EXECUTING or COMPLETED states by using
OSS to change them (see Section 13.1.3).
Operation:
bort
Cancel
HOQ
Deselect
Pause
Resume
Start
Stop
ttribute:
ObjID
ObjType
CarrierInputSpec
CurrentPRJob
DataCollectionPlan
MtrlOutSpec
MtrlOutbyStatus
PauseEvent
ProcessOrderMgmt
ProcessingCtrlSpec
State
StartMethod
ControlJob
ttribute:
ObjType
ObjID
PRMtlType
PRMtlNameList
etc.
ProcessJob
(SEMI E40)
Equipment
manages
FactoryHost
requests services of
manages
Carrier
Material
Substrate
specifies
+1
+1
Figure 1
ControlJob Object Model