双焦距微透镜阵列的激光蚀刻制备方法

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本文主要探讨了"Lens-on-lens microstructures"这一主题，这是一种在三维成像和实时探测未受限制或波动目标中具有重要作用的光学元件设计。微透镜阵列，特别是具有多焦距的微透镜，因其独特的聚焦和成像能力而备受关注。研究者们在该文中介绍了一种新颖的微结构制作方法，即采用两步飞秒激光湿刻蚀工艺来制造。具体而言，研究人员在西安交通大学的几个实验室（国家制造业系统工程重点实验室、机械工程学院以及信息光电技术重点实验室）合作，开发出了一种3×3的微透镜阵列，其直径达到了129.0微米。这个微透镜阵列的关键特性在于它具有两个不同的焦距，分别是80.4微米和188.7微米。这种设计允许在单一光学系统内实现两级聚焦，这意味着它能够在不同的空间位置提供不同的清晰度，这对于需要多角度、多层次观察或者快速捕捉动态目标的应用场景来说具有显著的优势。飞秒激光湿刻蚀作为一种精密加工技术，能够精确控制微纳尺度的材料去除，从而创造出具有复杂几何形状的微结构。通过这种方法制备的微透镜阵列，不仅尺寸紧凑，而且能保持稳定的光学性能，这对于集成光学系统和微型传感器领域至关重要。此外，文章还提到了实验接收日期、修订和接受日期，以及最终的发布日期，这表明这项研究是在2015年进行，并且在光学设计和制造领域引起了关注。作者chengfeng@mail.xjtu.edu.cn是论文的通讯作者，展示了该研究团队在光学设计与制造领域的专业知识和创新能力。这篇关于Lens-on-lens microstructures的研究提供了关于如何利用先进的微加工技术制造多功能微透镜阵列的重要信息，对于光子学、微电子和光学器件的设计和优化具有实际应用价值。在未来，这种技术可能被应用于诸如光学通信、生物医学成像和机器人视觉等领域，推动科技进步和创新。

Lens-on-lens microstructures

QING YANG,

1,2

SIYU TONG,

1,2

FENG CHEN,

1,3,

*ZEFANG DENG,

1,3

HAO BIAN,

1,3

GUANGQING DU,

1,3

JIALE YONG,

1,3

AND XUN HOU

State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, Shaanxi, China

School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, Shaanxi, China

Key Laboratory of Photonics Technology for Information, School of Electronics & Information Engineering, Xi’an Jiaotong University,

Xi’an 710049, Shaanxi, China

*Corresponding author: chengfeng@mail.xjtu.edu.cn;

Received 18 September 2015; revised 22 October 2015; accepted 22 October 2015; posted 22 October 2015 (Doc. ID 249778);

published 10 November 2015

Microlenses with multiple focal lengths play an important

role in three-dimensional imaging and the real-time detec-

tion of unconfined or fluctuating targets. In this Letter, we

present a novel method of fabricating lens-on-lens micro-

structures (LLMs) using a two-step femtosecond laser wet

etching process. A 3 × 3 LLM array was made with a diam-

eter of 129.0 μm. The fabricated LLM has two focal lengths,

80.4 and 188.7 μm, showing excellent two-level focusing

and imaging abilities. Its size and focal length can be

controlled by adjusting laser power and etching time. Its

surface roughness remains about 61 nm. This simple and

efficient method for large-scale production of LLMs has

potential applications in diverse optical systems.

Optical Society of America

OCIS codes: (220.0220) Optical design and fabrication; (230.0230)

Optical devices; (220.3630) Lenses; (140.3330) Laser damage.

http://dx.doi.org/10.1364/OL.40.005359

Microlenses are crucial optical devices because of their extensive

applications in optical sensing technology, optical waveguides,

optical fiber coupling, artificial compound eye structures,

micro-manufacturing, biochemical systems, and lab-on-a-chip

systems [1–7]. In the recent years, microlenses with special

structures have played more important roles than simple lenses

in many applications; an example of the former type is the

Fresnel microlens, which can be integrated with other optical

components, owing to its nearly flat surface [

8]. An elliptic-

cone-shaped microlens offers great advantages in efficient cou-

pling between high-power laser diodes and single-mode fibers

[9]. Cylind rical microlens arrays can increase the luminous cur-

rent efficiency of the OLED panel and make the spectrum of

the OLED panel more insensitive to the viewing angle [

10].

In this Letter, based on the femtosecond laser wet etching

technology [

11,12], we propose a two-step femtosecond laser

wet etching method to fabricate a concave lens-on-lens micro-

structure (LLM). The fabricated LLM has two focal lengths,

which has potential applications in optical storage [

13,14], ex-

tended depth of focus of a laser beam [

15], real- time detection

of the unconfined or fluctuating targets [

7], etc. By adjusting

laser power and etching time, we obtained LLMs with both

changeable size and focal length.

A convex LLM array was simply achieved on polydimethyl-

siloxane (PDMS) and polymethylmethacrylate (PMMA) surfa-

ces through a replica molding process. The morphology and

three-dimensional (3-D) profiles of the LLMs were measured

by a scanning electron microscope (SEM) and confocal laser

scanning microscope (CLSM). The optical performance of the

LLMs was also tested, and the results presented below show the

excellent imaging and focusing abilities of the LLMs.

The fabrication process of the LLMs, as shown in Fig.

includes first femtosecond laser irradiation, first buffered HF

wet etching, second femtosecond laser irradiation, second buf-

fered HF wet etching, and replica molding. First, a square-

arranged crater array was induced on polished silica glass chips

using femtosecond laser pulses (800 nm, 50 fs, 1 KHz) with a

power (P) of 5 mW focused through an objective lens, which

had a numerical aperture of 0.5 [Fig.

1(a)]. The laser power and

irradiation time could be controlled by a variable density filter

and a fast mechanical shutter. Then, the irradiated sample

was put into a 3% hydrofluoric (HF) acid solution at room

temperature. After buffered HF wet etching, the irradiated cra-

ters were transformed into concave microlenses [Fig.

1(b)]. An

ultrasonic bath was necessary to ensure conformity and high

speed by removing the bubbles generated at a liquid–solid in-

terface during the chemical etching process. Subsequently, the

femtosecond laser with a lower power (3 mW) irradiated the

center of the bottom of the concave microlenses for the second

time [Fig.

1(c)]. Then, the sample was treated again with a 3%

HF acid solution at the same temperature [Fig. 1(d)]. Finally,

the concave LLMs were formed. Further, convex LLMs on

PDMS and PMMA surfaces could be obtained by a simple rep-

lica molding process [Figs.

1(e) and 1(f)].

To investigate the formation process of the LLMs, a series of

SEM pictures were taken at different times during the process, as

shown in Fig.

2. Figure 2(a) shows the SEM image of an

untreated crater irradiated by the femtosecond laser, which

reveals that some nanostructures exist in the crater. These

structures are considered to be Lewis bases that accelerate the

Letter

Vol. 40, No. 22 / November 15 2015 / Optics Letters 5359

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