硅基超宽带敏感磁致光学腔传感器

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"Ultrabroadband and Sensitive Cavity Optomechanical Magnetometry: A Breakthrough in Room-Temperature Sensing" 在现代科技领域，磁敏光子学是一个日益重要的研究方向，尤其是在磁性测量技术上。这篇文章报道了一种创新的方法，即利用磁致伸缩材料Terfenol-D构建的超宽带、高灵敏度的腔光机械磁传感器。Terfenol-D以其显著的磁致伸缩效应而闻名，它能够在外部磁场作用下发生体积变化，这一特性使其在光学读出系统中展现出巨大的潜力。传统的磁性检测通常依赖于低温环境下的量子级传感器，如原子磁共振或超导量子干涉器。然而，这项研究通过将Terfenol-D微粒嵌入高质量（Q）光学微腔内，实现了在室温条件下进行磁性测量的重大突破。微腔作为光与物质相互作用的关键平台，其设计使得光的强度变化与Terfenol-D的微小位移之间建立了紧密的关联，从而实现对磁场的高精度探测。研究人员通过精心设计微腔的物理结构，成功地提高了系统的磁灵敏度，达到了惊人的26皮特斯拉每赫兹（pT/Hz），这个数值与目前最好的低温微尺度磁传感器相当。此外，他们还实现了3分贝带宽高达11.3兆赫兹（MHz），这意味着传感器具有极高的动态范围，能够快速响应瞬息万变的磁场变化。该研究展示了两种不同的磁响应模式，这不仅增加了系统的多功能性，也为未来的磁性信号处理和分析提供了新的可能性。这种超宽带和高灵敏度的腔光机械磁传感器不仅可以应用于基础科学研究，例如地磁场监测、生物医学成像中的磁标记追踪，还可以在工业环境中用于精密设备的磁场防护和控制，甚至可能推动量子信息科学的发展，因为其与量子态操控的兼容性。这项工作标志着磁致伸缩光子学在磁性测量领域的重大进展，有望开启室温条件下高效、实时磁性检测的新时代，极大地扩展了我们在日常生活中和科研工作中对磁场感知的能力。随着技术的进一步优化和规模化生产，这些高性能的磁传感器无疑将对未来科技发展产生深远影响。"

Ultrabroadband and sensitive cavity

optomechanical magnetometry

BEI-BEI LI,

GEORGE BRAWLEY,

HAMISH GREENALL,

STEFAN FORSTNER,

EOIN SHERIDAN,

HALINA RUBINSZTEIN-DUNLOP,

AND WARWICK P. B OWEN

Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China

School of Mathematics and Physics, The University of Queensland, St Lucia, QLD 4072, Australia

*Corresponding author: w.bowen@uq.edu.au

Received 11 February 2020; revised 7 April 2020; accepted 10 April 2020; posted 10 April 2020 (Doc. ID 390261); published 3 June 2020

Magnetostrictive optomechanical cavities provide a new optical readout approach to room-temperature magne-

tometry. Here we report ultrasensitive and ultrahigh bandwidth cavity optomechanical magnetometers con-

structed by embedding a grain of the magnetostrictive material Terfenol-D within a high quality (Q) optical

microcavity on a silicon chip. By engineering their physical structure, we achieve a peak sensitivity of

26 pT∕



comparable to the best cryogenic microscale magnetometers, along with a 3 dB bandwidth as high

as 11.3 MHz. Two classes of magnetic response are observed, which we postulate arise from the crystallinity of the

Terfenol-D. This allows single crystalline and polycrystalline grains to be distinguished at the level of a single

particle. Our results may enable applications such as lab-on-chip nuclear magnetic spectroscopy and magnetic

navigation.

https://doi.org/10.1364/PRJ.390261

1. INTRODUCTION

The resonant enhancement of both optical and mechanical

response in a cavity optomechanical system [1,2] has enabled

precision sensors [3] of displacement [4,5], force [6], mass [7],

acceleration [8,9], ultrasound [10], and magnetic fields [11–17].

Cavity optomechanical magnetometers are particularly attrac-

tive, promising state-of-the-art sensitivity without the need

for cryogenics, with only microwatt power consumption

[11–13,15–17], and with silicon chip-based fabrication offering

scalability [16]. For instance, cavity optomechanical magnetom-

eters working in the megahertz frequency range have been dem-

onstrated by using a magnetostrictive material Terfenol-D,

either manually deposited onto a microcavity [11,12,15] with

a reported peak sensitivity of 200 pT∕

ﬃﬃﬃﬃﬃﬃ

[12], or sputter

coated onto the microcavity with a reported peak sensitivity

of 585 pT∕

ﬃﬃﬃﬃﬃﬃ

[16]. Efforts have also been made to improve

the sensitivity in the hertz-to-kilohertz frequency range, which is

relevant to many applications. The nonlinearity inherent in

magnetostrictive materials has been used to mix the low fre-

quency signals up to high frequency [12]; a peak sensitivity

of 131 pT∕

ﬃﬃﬃﬃﬃﬃ

has been reported in the 100 kHz range using

a centimeter-sized CaF

cavity with a cylinder of Terfenol-D

crystal embedded inside [13]; and polymer coated microcavities

have been combined with millimeter-sized magnets to provide a

sensitivity of 880 pT∕

ﬃﬃﬃﬃﬃﬃ

at 200 Hz [17]. Resonant magnon

assisted optomechanical magnetometers have recently been real-

ized, achieving a sensitivity of 103 pT∕

ﬃﬃﬃﬃﬃﬃ

in the gigahertz

(GHz) frequency range [18], while torque magnetometers have

also been demonstrated using nanomechanical systems for

magnetization measurement [19,20]. With all of this recent

progress, however, the sensitivity of the best optomechanical

magnetometers remains around an order of magnitude inferior

to similarly sized cryogenic magnetometers [21–23].

This paper focuses on optimizing the sensitivity of magne-

tostrictive optomechanical magnetometers. We find that the

sensitivity depends critically on the shape of the support that

suspends the magnetometer above the silicon chip. This sup-

port both constrains the magnetostriction-induced mechanical

motion and provides an avenue for thermal fluctuations to

enter the system. By engineering its structure to increase both

its compliance and the mechanical quality factor of the

device, we demonstrate around an order of magnitude im-

provement in sensitivity compared to previous works, to

26 pT∕

ﬃﬃﬃﬃﬃﬃ

. This is comparable to the similarly sized cryo-

genic magnetometers [21–23].

The magnetic response as a function of magnetic field fre-

quency is found to show two significantly different behaviors: a

relatively smooth resp onse modulated by the mechanical reso-

nances of the structure and a response that exhibits dramatic

variations as a function of frequency, with these variations oc-

curring under the envelope of the mechanical resonances. We

refer to these two behaviors as Type I and Type II, respectively.

The magnetic response of the Type II devices is observed to be

highly sensitive to direct current (DC) magnetic fields. We find

1064

Vol. 8, No. 7 / July 2020 / Photonics Research

Research Article

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