IEEE PHOTONICS TECHNOLOGY LETTERS, VOL. 27, NO. 6, MARCH 15, 2015 661
Low Operating Voltage and Small Gain Slope of
InGaAs APDs With p-Type Multiplication Layer
Ying-Jie Ma, Member, IEEE, Yong-Gang Zhang, Senior Member, IEEE,YiGu,Member, IEEE,
Xing-You Chen, Member, IEEE, Li Zhou, Su-Ping Xi, and Hao-Si-Bai-Yin Li
Abstract—We reported separate absorption and multiplication
InAlAs/InGaAs avalanche photodiodes with a p-type multipli-
cation layer. Wedge-shaped electric field profiles with different
gradients and peak intensities confined in a thin InAlAs avalanche
layer were realized. These devices showed optimum operating
gains up to 40 in linear mode with low operating voltages
<20 V, small gain slopes, and high-gain uniformity. Moreover,
a reduced breakdown voltage temperature coefficient <6mV/K
in the temperature range of 200–350 K was observed, whereas
the dark current showed a noticeable increase. Those multipli-
cation performances are attributed to the modified electric field
profiles and are ideally suitable for focal plane array imaging
applications.
Index Terms—Avalanche photodiodes, InAlAs/InGaAs, low
operating voltage, gain slope, FPAs.
I. INTRODUCTION
I
N
0.52
Al
0.48
As/In
0.53
Ga
0.47
As (referred to InAlAs and
InGaAs hereafter) avalanche photodetectors (APDs) have
been widely used in long-haul fiber and free-space communi-
cation systems. Apart from communication applications, APDs
can also be used for sensing and imaging applications, such
as focal plane arrays (FPAs) in space remote sensing [1] and
three-dimensional laser radar (LADAR) imaging [2]. In those
applications, low detection noise, low operating voltage and
high APD pixel gain uniformity are more crucial compared
to the response speed in communications. APD FPAs with
large nonuniformity are unusable at normal operating voltages,
as the gain factor (M) across the imaging arrays cannot be
equalized [3]. To improve the voltage compatibility for read-
out integrated circuits, a low operation voltage as well as a
small gain-voltage slope are highly preferred. That means M
is less sensitive to the operation voltage, and the fluctuations
between each pixel could be tolerated.
Essentially, APD’s gain characteristics are determined
by the electric field (E) profile in avalanche region.
Manuscript received October 23, 2014; revised December 22, 2014;
accepted January 6, 2015. Date of publication January 9, 2015; date
of current version February 20, 2015. This work was supported in
part by the Ministry of Science and Technology, China, under Grant
2012CB619202 and Grant 2014CB643900, in part by the National Basic
Research Program of China under Grant 2012CB619202 and Grant
2014CB643900, and in part by the National Natural Science Foundation
of China under Grant 61204133, Grant 61275113, Grant 61334004, and
Grant 61405232. (Corresponding author: Yong-Gang Zhang.)
The authors are with the State Key Laboratory of Functional Materials
for Informatics, Shanghai Institute of Microsystem and Information
Technology, Chinese Academy of Science, Shanghai 200050, China (e-mail:
yjma@mail.sim.ac.cn; ygzhang@mail.sim.ac.cn; ygu@mail.sim.ac.cn;
xychen@mail.sim.ac.cn; lzhou@mail.sim.ac.cn; spxi@mail.sim.ac.cn;
hsby@mail.sim.ac.cn).
Color versions of one or more of the figures in this letter are available
online at http://ieeexplore.ieee.org.
Digital Object Identifier 10.1109/LPT.2015.2389819
For APDs with typical p-i-n configuration, the E profile
in the avalanche region (i.e. the nominally i region but
actually a p
−
or n
−
region) is an interplay between the
doping profiles and layer thicknesses in multiplication,
charge and absorption layers. APDs using n-type doping
in the absorption and multiplication layer is preferable
in communication applications for the fast drift speed of
electrons and accordingly higher response speed, whereas
in case of sensing and imaging applications the hole drift
speed could still be high enough, thus render the possibility
of fine tailoring of such parameters in p type doping scheme.
By using doping concentrations in the multiplication region of
p ≤ 1× 10
16
cm
−3
, E was nearly uniform in the multiplication
layer for thicknesses below 1 μm. [4] To realize an APD
with high M but small operating voltage, a high E intensity
and a thin thickness of multiplication layer must be satisfied
simultaneously [5]. Meanwhile, if the gain-voltage slope needs
to be small, additional advance device designs must be utilized.
One possible route for reducing the gain slope might be
introducing a high E gradient in the avalanche region. So far,
works report on the fabrication of InAlAs/InGaAs APDs and
FPA sensors with low voltage and small gain-voltage slope are
virtually very limited; it is attractive to fabricate APDs with
such gain characteristics. Besides, temperature coefficient
is also an important specification for APDs. It is highly
desirable to fabricate APDs with small temperature coefficient
to maintain a stable gain and operating voltage [6], especially
in applications with high temperature dynamic range.
In this letter, we demonstrated the fabrication of separate
absorption and multiplication (SAM) InAlAs/InGaAs APDs
with low operating voltages less than 20 V, small gain slopes
and high gain uniformity. A Wedge-shaped E profile confined
in the avalanche region was realized by a 0.3-μmthick
p-type InAlAs multiplication layer doping to 3×10
17
cm
−3
.
By adjusting the doping concentration in InGaAs absorbers,
the gradient of the E profile was moderately reduced, resulting
in smaller dark currents, a larger breakdown voltage (V
BR
)
and larger M. These APDs showed optimum operating gains
up to 40 in linear mode with a slightly increased dark
current. A reduced V
BR
temperature coefficient below 6 mV/K
was also observed. Those multiplication performances are
attributed to the modified E profiles in the p-type avalanche
region.
II. D
EVICE FABRICATION
The InAlAs/InGaAs APD wafers were lattice-matched
grown in a VG Semicon-V80H gas-source molecular
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