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Library of Congress Cataloging-in-Publication Data:
May, Gary S.
Fundamentals of semiconductor manufacturing and process control / Gary S.
May, Costas J. Spanos.
p. cm.
“Wiley-Interscience.”
Includes bibliographical references and index.
ISBN-13: 978-0-471-78406-7 (cloth : alk. paper)
ISBN-10: 0-471-78406-0 (cloth : alk. paper)
1. Semiconductors—Design and construction. 2. Integrated circuits—Design
and construction. 3. Process control—Statistical methods. I. Spanos, Costas
J. II. Title.
TK7871.85.M379 2006
621.3815
2—dc22
2005028448
Printed in the United States of America
10987654321
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