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title: Plasma Physics and Engineering author: Fridman, Alexander A.; Kennedy, Lawrence A. publisher: Taylor & Francis Routledge isbn10 | asin: 1560328487 print isbn13: 9781560328483 ebook isbn13: 9780203334874 language: English subject Plasma (Ionized gases) , Plasma engineering, Plasma (Gaz ionisés) , Plasmas, Technique des. publication date: 2004 lcc: QC718.F77 2004eb ddc: 530.4/4 subject: Plasma (Ionized gases) , Plasma engineering, Plasma (Gaz ionisés) , Plasmas, Technique des. cover
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Cover
title: Plasma Physics and Engineering
author: Fridman, Alexander A.; Kennedy, Lawrence A.
publisher: Taylor & Francis Routledge
isbn10 | asin: 1560328487
print isbn13: 9781560328483
ebook isbn13: 9780203334874
language: English
subject Plasma (Ionized gases) , Plasma engineering, Plasma (Gaz
ionisés) , Plasmas, Technique des.
publication date: 2004
lcc: QC718.F77 2004eb
ddc: 530.4/4
subject: Plasma (Ionized gases) , Plasma engineering, Plasma (Gaz
ionisés) , Plasmas, Technique des.
cover
Page i
Plasma Physics and Engineering
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Page iii
Plasma Physics and Engineering
Alexander Fridman
Lawrence A.Kennedy
NEW YORK • LONDON
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Denise T.Schanck,
Vice President
Robert L.Rogers,
Senior Editor
Summers Scholl,
Editorial Assistant
Savita Poornam,
Marketing Manager
Randy Harinandan,
Marketing Assistant
Susan Fox,
Project Editor

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Shayna Murry,
Cover Designer
Published in 2004 by
Taylor & Francis
29 West 35th Street
New York, NY 10001-2299
This edition published in the Taylor & Francis e-Library, 2006.
To purchase your own copy of this or any of Taylor & Francis or Routledge’s collection of thousands of eBooks
please go to www.eBookstore.tandf.co.uk.
Published in Great Britain by
Taylor & Francis
4 Park Square
Milton Park
Abingdon OX14 4RN
www.taylorandfrancis.com
Copyright © 2004 by Taylor & Francis Books, Inc.
All rights reserved. No part of this book may be reprinted or reproduced or utilized in any
form or by any electronic, mechanical, or other means, now known or hereafter invented,
including photocopying and recording, or in any information storage or retrieval system,
without permission in writing from the publishers.
10 9 8 7 6 5 4 3 2 1
Library of Congress Cataloging-in-Publication Data
Fridman, Alexander A., 1953–
Plasma physics and engineering/by Alexander
A.Fridman and Lawrence A.Kennedy
p. cm.
ISBN 1-56032-848-7 (hardcover: alk. paper)
1. Plasma (Ionized gases). 2. Plasma engineering. I. Kennedy, Lawrence A., 1937–
II. Title.
QC718.F77 2004
530.4′4–dc22 2003022820
ISBN 0-203-33487-6 Master e-book ISBN
ISBN 1-56032-848-7 (Print Edition)
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Preface
Plasma enjoys an important role in a wide variety of industrial processes, including material processing;
environmental control; electronic chip manufacturing; light sources; bio-medicine; and space propulsion. It is
also central to understanding most of the universe outside the Earth. As such, the focus of this book is to
provide a thorough introduction to the subject and to be a valued reference that serves engineers and
scientists as well as students. Plasma is not an elementary subject and the reader is expected to have the
normal engineering background in thermodynamics, chemistry, physics, and fluid mechanics upon which to
build an understanding of this subject.
This text has been organized into two parts. Part I addresses the basic physics of plasma. Chapter 2 examines
the elementary processes of charge species in plasma and Chapter 3 provides a thorough introduction to the
elementary processes of excited molecules and atoms in plasmas. Chapter 4 and Chapter 5 examine the
kinetics of charged/excited particles and Chapter 6 gives a thorough introduction to the electrostatics,
electrodynamics, and fluid mechanics of plasma.
Part II addresses the physics and engineering of electric discharges, specifically examining glow and arc
discharges (Chapter 7 and Chapter 8); cold atmospheric pressure discharges typically associated with corona,
dielectric barrier, and spark discharges (Chapter 9); plasma created in high-frequency electromagnetic fields
characterized by radio-frequency, microwave, and optical discharges (Chapter 10); and discharges in aerosols
and dusty plasmas (Chapter 11). The second part of Chapter 12 concludes with discussions on electron beam
plasmas. The authors have drawn upon extensive work in the Russian literature in addition to the more
accessible results from the West. We believe that this will add an important dimension to development of this
subject.
This text is adaptable to a wide range of needs. The material has been taught to graduate and senior-level
students from most engineering disciplines and physics. For the latter, it can be packaged to focus on the
basic physics of plasma with only selections from discharge applications. For graduate courses, a faster pace

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can be set that covers Part I and Part II. Presently, the text is used for a plasma engineering course sequence
(Plasma I, Plasma II) at Drexel University.
We gratefully acknowledge the loving support of our wives, Irene Fridman and Valaree Kennedy; the
governmental research support of the National Science Foundation and the U.S. Department of Energy,
together with our long-term industrial sponsors, Air Liquide, Texaco, Kodak, Georgia Pacific, and Applied
Materials. We especially appreciate John and Chris Nyheim and the Kaplan family for their support of plasma
research at Drexel University and University of Illinois at Chicago. Additionally, we gratefully acknowledge the
invaluable, stimulating discussions with our colleagues, Professors Young Cho, Gary Friedman, Baki Farouk,
Alexei V.Saveliev
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and Alexander Gutsol, and our students. We thank K.Gutsol, A.Fridman, G. Fridman, and A.Chirokov for help
with illustrations.
Alexander Fridman
Lawrence A.Kennedy
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Page vii
Table of Contents
PART I
Fundamentals of Plasma Physics and Plasma Chemistry
1
Chapter
1
Plasma in Nature, in the Laboratory, and in Industry 3
1.1 Occurrence of Plasma: Natural and Manmade Plasmas 4
1.2 Gas Discharges 6
1.3 Plasma Applications: Plasmas in Industry 8
1.4 Plasma Applications for Environmental Control 10
1.5 Plasma Applications in Energy Conversion 11
1.6 Plasma Application for Material Processing 13
Chapter
2
Elementary Processes of Charged Species in Plasma 15
2.1 Elementary Charged Particles in Plasma and Their Elastic and Inelastic Collisions 15
2.1.1 Electrons 16
2.1.2 Positive Ions 17
2.1.3 Negative Ions 18
2.1.4 Elementary Processes of Charged Particles 19
2.1.5 Fundamental Parameters of Elementary Processes 20
2.1.6 Reaction Rate Coefficients 21
2.1.7 Elementary Elastic Collisions of Charged Particles 22
2.2 Ionization Processes 24
2.2.1 Direct Ionization by Electron Impact 24
2.2.2 Direct Ionization Rate Coefficient 26
2.2.3 Peculiarities of Dissociation of Molecules by Electron Impact: the Frank-Condon Principle
and the Process of Dissociative Ionization
28
2.2.4 Stepwise Ionization by Electron Impact 29
2.2.5 Ionization by High Energy Electron Beams 32
2.2.6 Photoionization Processes 33
2.2.7 Ionization by Collisions of Heavy Particles: Adiabatic Principle and Massey Parameter 34
2.2.8 The Penning Ionization Effect and Process of Associative Ionization 35
2.3 Mechanisms of Electron Losses: Electron-Ion Recombination 36
2.3.1 Different Mechanisms of Electron-Ion Recombination 37
2.3.2 Dissociative Electron-Ion Recombination 38
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2.3.3 Ion Conversion Reactions as a Preliminary Stage of Dissociative Electron-Ion
Recombination
40

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2.3.4 Three-Body Electron-Ion Recombination 40
2.3.5 Radiative Electron-Ion Recombination 42
2.4 Electron Losses due to Formation of Negative Ions: Electron Attachment and Detachment
Processes
42
2.4.1 Dissociative Electron Attachment to Molecules 43
2.4.2 Three-Body Electron Attachment to Molecules 46
2.4.3 Other Mechanisms of Formation of Negative Ions 47
2.4.4 Mechanisms of Negative Ion Destruction: Associative Detachment Processes 48
2.4.5 Electron Impact Detachment 50
2.4.6 Detachment in Collisions with Excited Particles 51
2.5 Ion-Ion Recombination Processes 52
2.5.1 Ion-Ion Recombination in Binary Collisions 52
2.5.2 Three-Body Ion-Ion Recombination: Thomson’s Theory 55
2.5.3 High-Pressure Limit of Three-Body Ion-Ion Recombination: Langevin Model 56
2.6 Ion-Molecular Reactions 58
2.6.1 Ion-Molecular Polarization Collisions: Langevin Rate Coefficient 58
2.6.2 The Ion-Atom Charge Transfer Processes 61
2.6.3 Nonresonant Charge Transfer Processes 64
2.6.4 Ion-Molecular Reactions with Rearrangement of Chemical Bonds 65
2.6.5 Ion-Molecular Chain Reactions and Plasma Catalysis 66
2.6.6 Ion-Molecular Processes of Cluster Growth: the Winchester Mechanism 67
Problems and Concept Questions 69
Chapter
3
Elementary Processes of Excited Molecules and Atoms in Plasma 73
3.1 Electronically Excited Atoms and Molecules in Plasma 73
3.1.1 Electronically Excited Particles: Resonance and Metastable States 74
3.1.2 Electronically Excited Atoms 74
3.1.3 Electronic States of Molecules and Their Classification 77
3.1.4 Electronically Excited Molecules and Metastable Molecules 78
3.2 Vibrationally and Rotationally Excited Molecules 81
3.2.1 Potential Energy Curves for Diatomic Molecules: Morse Potential 81
3.2.2 Vibration of Diatomic Molecules: Model of Harmonic Oscillator 84
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Page ix
3.2.3 Vibration of Diatomic Molecules: Model of Anharmonic Oscillator 86
3.2.4 Vibrationally Excited Polyatomic Molecules: the Case of Discrete Vibrational Levels 88
3.2.5 Highly Vibrationally Excited Polyatomic Molecules: Vibrational Quasi Continuum 92
3.2.6 Rotationally Excited Molecules 94
3.3 Elementary Processes of Vibrational, Rotational, and Electronic Excitation of Molecules in Plasma 96
3.3.1 Vibrational Excitation of Molecules by Electron Impact 96
3.3.2 Lifetime of Intermediate Ionic States during Vibrational Excitation 97
3.3.3 Rate Coefficients of Vibrational Excitation by Electron Impact: Semiempirical Fridman’s
Approximation
100
3.3.4 Rotational Excitation of Molecules by Electron Impact 101
3.3.5 Electronic Excitation of Atoms and Molecules by Electron Impact 103
3.3.6 Rate Coefficients of Electronic Excitation in Plasma by Electron Impact 104
3.3.7 Dissociation of Molecules by Direct Electron Impact 106
3.3.8 Distribution of Electron Energy in Nonthermal Discharges between Different Channels of Excitation
and Ionization
107
3.4 Vibrational (VT) Relaxation; the Landau-Teller Formula 113
3.4.1 Vibrational-Translational (VT) Relaxation: Slow Adiabatic Elementary Process 113
3.4.2 Quantitative Relations for Probability of the Elementary Process of Adiabatic VT Relaxation 115
3.4.3 VT Relaxation Rate Coefficients for Harmonic Oscillators: Landau-Teller Formula 117
3.4.4 Vibrational VT Relaxation of Anharmonic Oscillators 119
3.4.5 Fast Nonadiabatic Mechanisms of VT Relaxation 121
3.4.6 VT Relaxation of Polyatomic Molecules 122
3.4.7 Effect of Rotation on the Vibrational Relaxation of Molecules 124
3.5 Vibrational Energy Transfer between Molecules: VV Relaxation Processes 125
3.5.1 Resonant VV Relaxation 125

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3.5.2 VV Relaxation of Anharmonic Oscillators 127
3.5.3 Intermolecular VV′ Exchange 130
3.5.4 VV Exchange of Polyatomic Molecules 132
3.6 Processes of Rotational and Electronic Relaxation of Excited Molecules 135
3.6.1 Rotational Relaxation 135
3.6.2 Relaxation of Electronically Excited Atoms and Molecules 137
3.6.3 Electronic Excitation Energy Transfer Processes 138
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3.7 Elementary Chemical Reactions of Excited Molecules; Fridman-Macheret α-Model 139
3.7.1 Rate Coefficient of Reactions of Excited Molecules 139
3.7.2 Potential Barriers of Elementary Chemical Reactions: Activation Energy 140
3.7.3 Efficiency α of Vibrational Energy in Overcoming Activation Energy Barrier 142
3.7.4 Fridman-Macheret α-Model 142
3.7.5 Efficiency of Vibrational Energy in Elementary Reactions Proceeding through Intermediate
Complexes
146
3.7.6 Dissociation of Molecules Stimulated by Vibrational Excitation in Nonequilibrium Plasma 149
3.7.7 Dissociation of Molecules in Nonequilibrium Conditions with Essential Contribution of
Translational Energy
151
3.7.8 Chemical Reactions of Two Vibrationally Excited Molecules in Plasma 155
Problems and Concept Questions 155
Chapter
4
Plasma Statistics and Kinetics of Charged Particles 161
4.1 Statistics and Thermodynamics of Equilibrium and Nonequilibrium Plasmas: Boltzmann,
Saha, and Treanor Distributions
161
4.1.1 Statistical Distribution of Particles over Different States: Boltzmann Distribution 161
4.1.2 Equilibrium Statistical Distribution of Diatomic Molecules over Vibrational-Rotational States 163
4.1.3 Saha Equation for Ionization Equilibrium in Thermal Plasma 164
4.1.4 Dissociation Equilibrium in Molecular Gases 165
4.1.5 Equilibrium Statistical Relations for Radiation: Planck Formula and Stefan-Boltzmann Law 165
4.1.6 Goncepts of Complete Thermodynamic Equilibrium (CTE) and Local Thermodynamic
Equilibrium (LTE) for Plasma Systems
167
4.1.7 Partition Functions 168
4.1.8 Thermodynamic Functions of Thermal Plasma Systems 168
4.1.9 Nonequilibrium Statistics of Thermal and Nonthermal Plasmas 170
4.1.10 Nonequilibrium Statistics of Vibrationally Excited Molecules: Treanor Distribution 172
4.2 Boltzmann and Fokker-Planck Kinetic Equations: Electron Energy Distribution Functions 176
4.2.1 Boltzmann Kinetic Equation 176
4.2.2 The τ-Approximation of the Boltzmann Kinetic Equation 178
4.2.3 Macroscopic Equations Related to Kinetic Boltzmann Equation 179
4.2.4 Fokker-Planck Kinetic Equation for Determination of Electron Energy Distribution
Functions
180
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4.2.5 Different Specific Electron Energy Distribution Functions: Druyvesteyn Distribution 183
4.2.6 Electron Energy Distribution Functions in Different Nonequilibrium Discharge Conditions 186
4.2.7 Relations between Electron Temperature and Reduced Electric Field 187
4.3 Electric and Thermal Conductivity in Plasma: Diffusion of Charged Particles 189
4.3.1 Isotropic and Anisotropic Parts of Electron Distribution Functions 189
4.3.2 Electron Mobility and Plasma Conductivity 190
4.3.3 Similarity Parameters Describing Electron Motion in Nonthermal Discharges 192
4.3.4 Plasma Conductivity in Perpendicular Static Uniform Electric and Magnetic Fields 193
4.3.5 Conductivity of Strongly Ionized Plasma 195
4.3.6 Ion Energy and Ion Drift in Electric Field 196
4.3.7 Free Diffusion of Electrons and Ions 197
4.3.8 Einstein Relation among Diffusion Coefficient, Mobility, and Mean Energy 199
4.3.9 Ambipolar Diffusion 199
4.3.10 Conditions of Ambipolar Diffusion: Debye Radius 201
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