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HSMS

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SEMI E37-0298 © SEMI 1995, 19981

SEMI E37-0298

N/A

HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC

SERVICES

1 Purpose

HSMS provides a means for independent manufactur-

ers to produce implementations which can be con-

nected and interoperate without requiring speciﬁc

knowledge of one another.

HSMS is intended as an alternative to SEMI E4

(SECS-I) for applications where higher speed commu-

nication is needed or when a simple point-to-point

topology is insufﬁcient. SEMI E4 (SECS-I) can still be

used in applications where these and other attributes of

HSMS are not required.

HSMS is also intended as an alternative to SEMI E13

(SECS Message Services) for applications where TCP/

IP is preferred over OSI.

It is intended that HSMS be supplemented by subsid-

iary standards which further specify details of its use

or impose restrictions on its use in particular applica-

tion domains.

2 Scope

High-Speed SECS Message Services (HSMS) deﬁnes

a communication interface suitable for the exchange of

messages between computers in a semiconductor fac-

tory.

3 Referenced Documents

3.1 SEMI Standards

SEMI E4 — SEMI Equipment Communication Stan-

dard 1 — Message Transport (SECS-I)

SEMI E5 — SEMI Equipment Communication Stan-

dard 2 — Message Content (SECS-II)

3.2 IETF Documents

IETF RFC 791 — Internet Protocol

IETF RFC 792 — Internet Control Message Protocol

IETF RFC 793 — Transmission Control Protocol

1 The IETF documents can be obtained from The Network Information

Center, Network Solutions, 14700 Park Meadow Drive, Suite 200,

Chantilly, VA 22021 USA

IETF RFC 1120 — Requirements for Internet Hosts -

Communication Layers

IETF RFC 1340 — Assigned Numbers. Note: This

RFC supersedes RFC 820.

3.3 POSIX Document

IEEE POSIX P1003.12 — Protocol Independent Inter-

faces (PII)

4 Terminology

API — Application Program Interface. In the case of

TCP/IP, a set of programming conventions used by an

application program to prepare for or invoke TCP/IP

capabilities.

communication failure — A failure in the communica-

tion link resulting from a transition to the NOT CON-

NECTED state from the SELECTED state. (See

Section 9.)

conﬁrmed service (HSMS) — An HSMS service

requested by sending a message from the initiator to

the responding entity which requires that completion

of the service be indicated by a response message from

the responding entity to the initiator.

connection — A logical linkage established on a TCP/

IP LAN between two entities for the purposes of

exchanging messages.

control message — An HSMS message used for the

management of HSMS sessions between two entities.

data message — An HSMS message used for commu-

nication of application-speciﬁc data within an HSMS

session. A Data Message can be a Primary Message or

a Reply Message.

entity — An application program associated with an

endpoint of a TCP/IP connection.

header — A 10-byte data element preceding every

HSMS message.

2 POSIX documents can be obtained from Institute of Electrical and

Electronic Engineers (IEEE), 345 East 47th Street, New York, NY

10017 USA

2SEMI E37-0298 © SEMI 1995, 1998

initiator (HSMS) — The entity requesting an HSMS

service. The initiator requests the service by sending

an appropriate HSMS message.

IP Address — Internet Protocol Address. A logical

address which uniquely identiﬁes a particular attach-

ment to a TCP/IP network.

local entity — Relative to a particular end point of a

connection, the local entity is that entity associated

with that endpoint.

local entity-speciﬁc — General qualiﬁer to any proce-

dure, option, issue, or other implementation matter

which is not a subject of this standard and left to the

discretion of the individual supplier.

message — A complete unit of communication in one

direction. An HSMS Message consists of the Message

Length, Message Header, and the Message Text. An

HSMS Message can be a Data Message or a Control

Message.

message length — A 4-byte unsigned integer ﬁeld

specifying the length of a message in bytes.

open transaction — A transaction in progress.

port — An endpoint of a TCP/IP connection whose

complete network address is speciﬁed by an IP

Address and TCP/IP Port number.

port number — (or TCP port number). The address of

a port within an attachment to a TCP/IP network which

can serve as an endpoint of a TCP/IP connection.

primary message — An HSMS Data Message with an

odd numbered Function. Also, the ﬁrst message of a

data transaction.

published port — A TCP/IP IP Address and Port num-

ber associated with a particular entity (server) which

that entity intends to use for receiving TCP/IP connec-

tion requests. An entity's published port must be

known by remote entities intending to initiate connec-

tions.

receiver — The HSMS Entity receiving a message.

remote entity — Relative to a particular endpoint of a

connection, the remote entity is the entity associated

with the opposite endpoint of the connection.

reply — An HSMS Data Message with an even-num-

bered function. Also, the appropriate response to a Pri-

mary HSMS Data Message.

responding entity (HSMS) — The provider of an

HSMS service. The responding entity receives a mes-

sage from an initiator requesting the service. In the

event of a conﬁrmed service, the responding entity

indicates completion of the requested service by send-

ing an appropriate HSMS response message to the ini-

tiator of the request. In an unconﬁrmed service, the

responding entity does not send a response message.

session — A relationship established between two enti-

ties for the purpose of exchanging HSMS messages.

session entity — An entity participating in an HSMS

session.

session ID — A 16-bit unsigned integer which identi-

ﬁes a particular session between particular session

entities.

stream (TCP/IP) — A sequence of bytes presented at

one end of a TCP/IP connection for delivery to the

other end. TCP/IP guarantees that the delivered

sequence of bytes matches the presented stream.

HSMS subdivides a stream into blocks of contiguous

bytes - messages.

T3 — Reply timeout in the HSMS protocol.

T5 — Connect Separation Timeout in the HSMS proto-

col used to prevent excessive TCP/IP connect activity

by providing a minimum time between the breaking,

by an entity, of a TCP/IP connection or a failed attempt

to establish one, and the attempt, by that same entity, to

initiate a new TCP/IP connection.

T6 — Control Timeout in the HSMS protocol which

deﬁnes the maximum time an HSMS control transac-

tion can remain open before a communications failure

is considered to have occurred. A transaction is consid-

ered open from the time the initiator sends the required

request message until the response message is

received.

T7 — Connection Idle Timeout in the HSMS protocol

which deﬁnes the maximum amount of time which

may transpire between the formation of a TCP/IP con-

nection and the use of that connection for HSMS com-

munications before a communications failure is

considered to have occurred.

T8 — Network Intercharacter Timeout in the HSMS

protocol which deﬁnes the maximum amount of time

which may transpire between the receipt of any two

successive bytes of a complete HSMS message before

3 SEMI E37-0298 © SEMI 1995, 1998

a communications failure is considered to have

occurred.

TCP/IP — Transmission Control Protocol/Internet

Protocol. A method of communications which provides

reliable, connection-oriented message exchange

between computers within a network.

TLI — Transport Level Interface. One particular API

provided by certain implementations of TCP/IP which

provides a transport protocol and operating system

independent deﬁnition of the use of any Transport

Level protocol.

transaction — A Primary Message and its associated

Reply message, if required. Also, an HSMS Control

Message of the request (.req) type, and its response

Control Message (.rsp), if required.

unconﬁrmed service (HSMS) — An HSMS service

requested by sending a message from the initiator to

the responding entity which requires no indication of

completion from the responding entity.

5 HSMS Overview and State Diagram

High-Speed SECS Message Services (HSMS) deﬁnes

a communication interface suitable for the exchange of

messages between computers in a semiconductor fac-

tory using a TCP/IP environment. HSMS uses TCP/IP

stream support, which provides reliable two way

simultaneous transmission of streams of contiguous

bytes. It can be used as a replacement for SECS-I com-

munication as well as other more advanced communi-

cations environments.

The procedure for HSMS communications parallels

the more familiar SECS-I communications it replaces.

The following steps are followed for any communica-

tions (HSMS or otherwise):

1. Obtain a communications link between two enti-

ties. In SECS-I, this is the RS232 wire physically

connecting host and equipment. In HSMS, the link

is a TCP/IP connection obtained by the standard

TCP/IP connect procedure. Note that the abstract

term "entity" is used instead of "host" or "equip-

ment." This is because, while HSMS is used for

SECS-I replacement, it has more general applica-

tions as well. In a SECS-I replacement application,

the "host" is an "entity" and the "equipment" is an

"entity."

2. Establish the application protocol conventions to be

used for exchanging data messages between two

entities. For SECS-I, this step is implicit in the fact

that semiconductor equipment is physically con-

nected on the two ends of the wire: the protocol is

SECS-II.

In the case of HSMS, the communications link is a

dynamically established TCP/IP connection on a

physical link which may be shared with many other

TCP/IP connections using protocols other than

HSMS or connections using non TCP/IP protocols.

HSMS adds a message exchange (called the Select

procedure) which is used to conﬁrm to both entities

that the particular TCP/IP connection is to be used

exlusively for HSMS communications.

3. Exchange Data. This is the normal intended pur-

pose of the communications link. In both SECS-I

and HSMS, the procedure is to exchange SECS-II

encoded messages for the control of semiconductor

equipment and/or processes. Data exchange nor-

mally continues until one or both of the entities are

taken off-line for equipment-speciﬁc purposes,

such as maintenance.

4. Formally end communications. In SECS-I, there is

no formal requirement here; the equipment to be

taken off-line stops communicating.

In HSMS, a message exchange (either the “bilat-

eral” Deselect procedure or the “unilateral” sepa-

rate procedure) is used for both parties to conﬁrm

that the TCP/IP connection is no longer needed for

HSMS communications.

5. Break the communications link. In SECS-I, this is

done by physically unplugging the host or equip-

ment from the communications cable, which only

occurs during repair or physical reconﬁguration of

the factory network environment.

In HSMS, since it uses the dynamic connection

environment of TCP/IP, the TCP/IP connection is

logically broken via a release or a disconnect pro-

cedure without any physical disconnect from the

network medium.

Two additional procedures, of a diagnostic nature, are

supported in HSMS, which are generally not required

by a simple SECS-I link or a SECS-I direct replace-

ment. These follow:

1. Linktest. This procedure provides a simple conﬁr-

mation of connection integrity.

5.3 State Transition Table

6 Use of TCP/IP

6.1 TCP/IP API — The specification of a required TCP Application Program Interface (API) for use in imple-

mentations is outside the scope of HSMS. A given HSMS implementation may use any TCP/IP API — sockets,

TLI (Transport Layer Interface), etc. — appropriate to the intended hardware and software platform, as long as it

provides interoperable TCP/IP streams protocol on the network.

The appendix contains examples of the TCP/IP procedures referenced in this standard and sample scenarios using

both the TLI (POSIX standard 1003.12) and the popular BSD socket model for TCP/IP communication.

6.2 TCP/IP Network Addressing Conventions

6.2.1 IP Addresses — Each physical TCP/IP connection to a given Local Area Network (LAN) must have a

unique IP Address. IP Addresses must be assignable at installation time, and an HSMS implementation cannot

select a fixed IP Address. A typical IP Address is 192.9.200.1.

IP imposes restrictions on these numbers which are outside the scope of the HSMS protocol. Consult Section 2.3

of RFC 791, Internet Protocol (IP) in Section 3.

6.2.2 TCP Port Numbers — A TCP Port Number can be considered as an extension of the IP Address.

HSMS implementations should allow conﬁguring TCP Port to the full range of the TCP/IP implementation used.

A typical TCP Port Number is 5000.

Conventions have been established for selecting TCP Port Numbers which are outside the scope of the HSMS pro-

tocol. Consult RFC 793, Transmission Control Protocol (TCP) in Section 3.

6.3 Establishing a TCP/IP Connection

6.3.1 Connect Modes — The procedures for establishing a TCP/IP connection are defined in RFC 793. However,

not all the procedures defined by RFC 793 are supported by commonly available APIs. In particular, while RFC

793 permits both entities to initiate the connection simultaneously, this feature is rarely supported in available

# Current State Trigger New State Actions Comment

1 ... Local entity-speciﬁc

preparation for TCP/IP

communication.

NOT CONNECTED Local entity-speciﬁc Action depends on

connection procedure to be

used: active or passive.

2 NOT

CONNECTED

A TCP/IP connection is

established for HSMS

communication.

CONNECTED -

NOT SELECTED

Local entity-speciﬁc none

3 CONNECTED Breaking of TCP

connection.

NOT CONNECTED Local entity-speciﬁc See Section 6.4.

4 NOT SELECTED Successful completion

of HSMS Select

Procedure.

SELECTED Local entity-speciﬁc HSMS communication is

now fully established:

data message exchange

is permitted.

5 SELECTED Successful completion

of HSMS Deselect or

Separate.

NOT SELECTED Local entity-speciﬁc This transition normally

indicates the end of HSMS

communication and so an

entity would immediately

proceed to break the TCP/IP

connection (transition 3

above).

6 NOT SELECTED T7 Connection Timeout. NOT CORRECTED Local entity-speciﬁc per Section 9.2.2

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