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SECS GEM标准白皮书
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SECS GEM标准白皮书 有助于了解SECS GEM标准 适合初学者了解协议 有利快速开发(Cimetrix_SECS_GEM_Stds_WP_July_2016.pdf)
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Introduction to the SEMI
Standards: SECS/GEM
July 6, 2016
www.cimetrix.com
Introduction to the SEMI Standards: SECS/GEM Page 2 of 14
- NOTICE -
The information contained in this document is subject to change without notice. Every effort has been made to
supply complete and accurate information. However, Cimetrix Inc. makes no warranty of any kind with regard to
this document, including, but not limited to, the implied warranties of merchantability and fitness for a particular
purpose. Cimetrix shall not be liable for errors contained herein or direct, indirect, special, incidental, or
consequential damages in connection with the furnishing, performance, or use of this document.
- COPYRIGHT -
©2016 Cimetrix Incorporated. All rights reserved. No part of this work may be copied, modified, distributed in any
form or by any means, or stored in any database or retrieval system, without the prior written permission of Cimetrix
Incorporated, except as permitted by law. Violation of copyright carries civil and criminal penalties.
- TRADEMARKS -
Cimetrix is a registered trademark. CIM300, CIMConnect, CIMFoundation, CIM40, CIM87, CIM90, CIM94, CIM58,
CIM116, CIM148, CIM157, SECSConnect, ECCE Plus, TESTConnect, CIMPortal, CIMPortal Plus, EDAConnect, and
CIMControlFramework (CCF) are trademarks of Cimetrix Incorporated. All other registered trademarks and
trademarks are properties of their respective holders.
Introduction to the SEMI Standards: SECS/GEM Page 3 of 14
Table of Contents
1 Overview ................................................................................... 4
2 Industrial Usage of the GEM Standard ............................................... 4
2.1 Semiconductor Front End ................................................................................................................ 4
2.2 Semiconductor Back End ................................................................................................................. 4
2.3 Flat Panel Display ............................................................................................................................ 5
2.4 Surface Mount Technology .............................................................................................................. 5
2.5 Photovoltaic ...................................................................................................................................... 5
2.6 High-Brightness LEDs ...................................................................................................................... 5
3 GEM Host and Equipment Communication ......................................... 5
4 SECS-II Message Communication .................................................... 6
5 Feature Summary ........................................................................ 7
5.1 Communication ................................................................................................................................ 8
5.2 Control .............................................................................................................................................. 8
5.3 Operation Notification ....................................................................................................................... 8
5.4 Data Gathering ................................................................................................................................. 8
5.5 Process Program (Recipe) Management ......................................................................................... 9
5.6 Spooling ........................................................................................................................................... 9
5.7 Documentation ............................................................................................................................... 10
6 GEM Compliance ....................................................................... 10
7 Frequently Asked Questions ......................................................... 11
8 GEM Terminology ...................................................................... 13
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