四探针电阻率测试仪的设计_stm32电阻率测量

需积分: 16 74 浏览量更新于2023-03-16 评论 2 收藏 1.16MB DOC 举报

身份认证购VIP最低享 7 折!

领优惠券(最高得80元）

资源详情

资源评论

资源推荐

LANZHOU UNIVERSITY OF TECHNOLOGY

毕业设计

题目

学生姓名

学号

专业班级

指导教师

学院

答辩日期

兰州理工大学毕业设计

因此，研究薄膜电阻率的测量系统原理、软硬件集成方法等具有很重要的意义和应用

价值。

在综合比较各种电阻率测量方法的基础上，本设计采用双电测组合法测量薄膜电

阻率。首先，系统研究双电测组合法薄膜电阻率测量原理，跟据测量要求改进电阻率

的计算方法，极大的简化相关修正，提高测量结果的可靠性和精确度。其次，基于单

片机的Rymaszewski四探针双电测组合法设计了薄膜电阻率自动化测量系统。在8051单

片机的控制下，利用基于CD4052芯片的接口电路实现电流探针，电压探针的自动切换，

并通过单片机控制实现两次电压测量；同时根据两次测量结果编程完成范德堡修正因

子的计算，最终实现薄膜电阻率自动测量和显示，建立基于8051单片机的双电测四探

针薄膜电阻率测量系统。实验结果表明，所设计的自动测量系统不仅可以满足多种薄

膜电阻率测量要求，而且提高了测量精度和自动化程度，同时精简了薄膜电阻率测量

过程。

关键词：四探针双电测组合法; 范德堡修正因子;CD4052; 薄膜电阻率

Abstract

Attention is mainly paid to the measurement of resistivity--an important property of

thin film. Owing to apply traditional four-probe method on film sample resistivity

measurement, complex corrections are required in order to acquire an accurate result and

sample will easily be scratched during the measuring process when using manual four-probe

equipment. Therefore, the measurement theory, software and hardware integration method by

virtual instrumentation for thin film resistivity automatic system are of important value.

In comprehensive comparative measurement method of resistivity, on the basis of the

design USES double electrical measurement group legal measuring film resistivity. First,

system research double electrical measurement is the legitimate film resistivity measurements

of the principle with according to measurement requirements, the calculation method of

improving resistivity, greatly simplified related correction, improve the reliability and

兰 州 理 工 大 学 毕 业 设 计
precision   measurement   result.   Secondly,Based   on   SCM   Rymaszewski   four-point   probe
double   electrical   measurement   group   the   film   resistivity   legitimate   design   automation
measuring system. In 8051 under  the control of the single chip microcomputer based on
CD4052   chip   interface   circuit   implements   current   probe,   voltage   probe   to   switch,   and
through   the   single-chip   microcomputer   control   achieve   two   voltage   measurement;   And
according to two measurement results programmed Vanderbilt correction factor calculation,
and finally achieve the film resistivity of automatic measurement and display, based on the
single chip microcomputer 8051 double electrical measurement of four probe film resistivity
measuring system. The experimental result shows that the design of automatic measurement
system   can   not   only   meet   a   variety   of   film   resistivity   measurement   requirements,   and
improve   the   measuring   precision   and   automation   degree,   and   streamline   film   resistivity
measurement process.
  
Keywords: dual electro measurement with four point probes; van der Pauw correction
factor ; CD4052; Film resistivity
      
目录
....................................................................................................................1
 摘 要.............................................................................................................1
关键词：四探针双电测组合法; 范德堡修正因子;CD4052; 薄膜电阻率...................2
ABSTRACT.......................................................................................................2
 第一章 绪论.................................................................................................4
1.1 设计的目的............................................................................................4
1.2 国内外研究进展.....................................................................................5
1.2.1 电阻率测量对薄膜材料研究的意义......................................................5
1.2.2 电阻率测量技术...............................................................................8
1.3 本章小结.............................................................................................13
2.1 四探针基本原理...................................................................................14
2.1.1 体原理..........................................................................................14
2.1.2 薄层原理.......................................................................................17
3

兰 州 理 工 大 学 毕 业 设 计
2.1.3 测准条件.......................................................................................18
2.2 双电测组合法测量原理..........................................................................18
2.3 本章小结.............................................................................................21
3.6 本章小结.............................................................................................33
4.1 系统设计.............................................................................................35
4.2 应用需求分析......................................................................................35
4.3 系统硬件结构设计................................................................................36
4.3.1 硬件选择.......................................................................................37
4.4 本章小结.............................................................................................45
5.2 信号采集模块......................................................................................47
5.3 信号处理模块......................................................................................49
5.4 薄膜电阻率的运算模块..........................................................................50
5.5 数据显示模块......................................................................................51
5.7 本章小结.............................................................................................53
总结.........................................................................................................54
第一章  绪论
1.1 设计的目的
电阻率是电子材料的基本参数，电阻率的精确测量对于材料机理研究和性能评价
有着重要的意义。针对不同材料，应该采用不同的方法来进行电阻率测量。肃然目前
可以应用的电阻率测量方法有很多种，但是仍然不能满足新型材料的测量需求。针对
新材料的特点改进原有方法或设计新的测量方法，也是新材料电阻率测量研究的重要
组成部分。
近年来，薄膜材料得到了越来越多的关注，而且随着对薄膜性能要求的提高，薄
膜的厚度也越来越薄，几百纳米的薄膜超薄膜的广泛研究对
近年来，薄膜材料得到了越来越多的关注，而且随着对薄膜性能要求的提高，膜
4