ASML_Reticle_manual_Final_2007_reticle

ASML

litho

需积分: 42 152 浏览量更新于2023-03-16 评论 12 收藏 4.8MB PDF 举报

身份认证购VIP最低享 7 折!

领优惠券(最高得80元）

资源详情

资源评论

资源推荐

Product Documentation

CONFIGURATION

SYS : PAS5500 series, TWINSCAN series

HW : 6 Inch reticles for 4x and 5x demagnification

SW : n.a.

Order Code

50163

Issue date

18 Jun 2007

Status

Final

Issue

2.1

ASML Confidential

This document is provided for employees of ASML and for selected employees of ASML's customers and agents,

in order to assist them in efficient use of ASML products. The document must not be disclosed to third parties.

RETICLE DESIGN MANUAL

6 Inch reticles

ASML Confidential

Disclaimer This publication is subject to change without notice and contains confidential and proprietary information of

ASML Holding N.V. or its affiliates ("ASML").

This documentation is for the intended purpose only and for the use of the intended recipient only. Please

retain control of this documentation. It is not to be forwarded or distributed. Any unauthorized review,

copying, use, disclosure or distribution is strictly prohibited. The material herein is provided "AS-IS" and

ASML makes no warranty of any kind with regard to this material.

ASML shall not be liable for errors and omissions contained herein.

Trademarks ASML, ASM Lithography, TWINSCAN, PAS 5500, PAS 5000, SA 5200, ATHENA, QUASAR, IRIS, ILIAS,

FOCAL, CPL, DDL, Micralign, Micrascan, 3DAlign, 2DStitching, 3DMetrology, MaskTools, LithoServer,

LithoGuide, Scattering Bars, MaskWeaver, LithoCruiser, LithoCool, AGILE, ImageTuner, EFESE and the

ASML logo are trademarks of ASML Holding N.V. or affiliate companies.

The trademarks may be used either alone or in combination with a further product designation.

Starlith, AERIAL, AERIAL II and, AERIAL XP are trademarks of Carl Zeiss.

Nothing in this publication is intended to make representations with regard to whether any trademark is

registered or to suggest that any sign other than those mentioned should not be considered to be a

trademark of ASML or of any third party.

Translation of

Documents

If this document is in a language other than English, please read the following text carefully.

While we strive to ensure that the information is translated correctly, no warranty or guarantee, express or

implied, is given as to its accuracy or that it is as current as the English version. We accept no liability for

any errors or omissions.

We shall not be liable for any damages (including, without limitation, damages for loss of business or loss of

profits) arising in contract, tort or otherwise from the use of or inability to use this document, or any material

contained in it, or from any action or decision taken as a result of using such material. If there is any conflict

or difference between the translated version of this document and its English version, the English version is

leading. If any part of the translated version is unclear, reference should be made to the English version.

Feedback If you have any comments, questions or ideas regarding this book or its contents, please contact us at:

e-mail comments@asml.com

post ASML

Publications Comments

PO box 324

5500 AH Veldhoven

The Netherlands

fax +31 40 268 3883

Please include:

- The issue date

- The ordering code number

- The page number, chapter or part number

- Your comment

- A description of any errors

- A proposal of any improvements.

Thank you for your support.

ASML Confidential

TABLE OF CONTENTS

Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii

PART I RETICLES FOR 4X REDUCTION

Chapter 1 Definitions of terms and concepts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

The definition of a location on a reticle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

Reticle Layout and Orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

The definition of chromium border . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

Name conventions for TIS marks. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Chapter 2 Generic Information on Reticle Design. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

Reticle substrate Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

The birefringence of the substrate 12

Phase Shift Mask (PSM) reticles 13

Reticle compatibility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

Contamination and Defects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

Bar code 15

Reticle prealignment mark 15

Reticle alignment mark 15

Reticle Data files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

Reticle Database Format information 17

Typical usage 17

Data files on Wafer Alignment Marks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

Chapter 3 Reticles Patterns (4x reduction) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .21

Reticle Prealignment mark . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

Reticle alignment mark for PAS 5500 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

TIS marks for Reticle Blue Alignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

The chromium borders for TIS_RBA marks 26

TIS_RBA-mark dimensions 27

Required chromium border between image field and TIS mark 28

TIS marks placement on production reticles 28

TIS marks for Reticle Shape Correction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

The layout of TIS_RSC marks 29

Chromium borders for vertical TIS_RSC marks 30

Chromium border between image field and vertical TIS_RSC marks 31

Vertical TIS_RSC marks placement on production reticles 31

How to deal with third-party reticle patterns . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

Image Border . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35

Minimum window size (PAS 5500 and TWINSCAN) 38

Bar code . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39

The 24-character bar code option 39

The 2D-Barcode option 41

Human Readable code . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47

Release pin (R-pin) area . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47

ASML Confidential

ii Table of Contents

Pellicle Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48

General requirements for pellicles 48

Pellicle location lines 49

Chapter 4 Reticle Layout (4x reduction). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51

PAS 5500/3x0 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52

PAS 5500/3x0 reticle pattern location 52

Reticle and pellicle dimensions for PAS 5500/3x0 54

PAS 5500 Step & Scan family . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56

PAS 5500 reticle pattern location 57

Reticle and pellicle dimensions for PAS 5500 Step & Scan 58

TWINSCAN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60

TWINSCAN reticle pattern location 61

Reticle and pellicle dimensions for TWINSCAN 62

TWINSCAN Reticle Shape Correction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65

Chromium-border and pellicle-frame specifications 65

RBA and TTL Compatible reticle for Step & Scan systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .68

PAS 5500 Step & Scan models, and TWINSCAN reticle pattern location 68

Reticle and pellicle dimensions for RBA and TTL compatible reticles 70

PART II RETICLES FOR 5X REDUCTION

Chapter 5 Definition of terms and concepts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74

Reticle layout and orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75

Chapter 6 Generic Information on Reticle Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77

Reticle substrate specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78

Contamination and Defects. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78

Bar Code 78

Reticle prealignment mark 78

Reticle alignment mark 79

Reticle Data files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79

Chapter 7 Reticle Patterns (5x reduction) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81

Reticle prealignment mark . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83

Reticle alignment mark . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84

Bar Code . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86

The 24-character bar code option 87

Pellicle position lines. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89

Human readable code . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89

Image border . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89

Minimum window 91

General requirements for Pellicles. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91

Chapter 8 Reticle Layout (5x reduction). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93

PAS 5500/22 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94

PAS 5500/60 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 98

PAS 5500/80 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102

PAS 5500/90 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106

PAS 5500/1xx series . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 110

PAS 5500/2xx series . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 114