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1 SEMI E5-0709 © SEMI 1982, 2009
SEMI E5-0709
SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE
CONTENT (SECS-II)
This standard was technically approved by the global Information & Control Committee. This edition was
approved for publication by the global Audits and Reviews Subcommittee on May 13, 2009. It was available
at www.semi.org in June 2009 and on CD-ROM in July 2009. Originally published 1982; previously
published November 2008.
NOTICE: The user’s attention is called to the possibility that some implementations of this standard, particularly
those related to the use of Stream 4, may involve the use of inventions covered by U.S. patents 4,884,674 and
5,216,613, and by other patents issued or pending, held by Texas Instruments Incorporated. By publication of this
standard, SEMI takes no position respecting either the applicability or the validity of these or other patent rights
asserted in connection with any item mentioned in this standard. Users of this standard are expressly advised that
determination of any such patent rights and the risk of infringement of such rights, are entirely their own
responsibility.
Table of Contents
1 Purpose .......................................................................................................................................................................3
2 Scope ..........................................................................................................................................................................3
3 Limitations..................................................................................................................................................................3
4 Referenced Standards and Documents .......................................................................................................................3
5 Terminology ...............................................................................................................................................................4
6 The Message Transfer Protocol..................................................................................................................................5
6.1 Intent....................................................................................................................................................................5
6.2 Message...............................................................................................................................................................5
6.3 Blocking Requirements........................................................................................................................................5
6.4 Message Header ..................................................................................................................................................5
6.5 Transaction Timeout............................................................................................................................................5
6.6 Multiple Open Transactions ................................................................................................................................6
7 Streams and Functions................................................................................................................................................6
7.1 Streams................................................................................................................................................................6
7.2 Functions.............................................................................................................................................................6
7.3 Stream and Function Allocation..........................................................................................................................6
8 Transaction and Conversation Protocols ....................................................................................................................7
8.1 Intent....................................................................................................................................................................7
8.2 Transaction Definition.........................................................................................................................................7
8.3 Transaction Level Requirements .........................................................................................................................7
8.4 Conversation Protocols.......................................................................................................................................7
9 Data Structures ...........................................................................................................................................................8
9.1 Intent....................................................................................................................................................................8
9.2 Item......................................................................................................................................................................8
9.3 List.......................................................................................................................................................................9
9.4 Localized Character String Items........................................................................................................................9
9.5 Example Data Structures...................................................................................................................................10
9.6 Data Item Dictionary.........................................................................................................................................11
9.7 Variable Item Dictionary...................................................................................................................................53
9.8 Object Dictionary ..............................................................................................................................................62
10 Message Detail .......................................................................................................................................................72
10.1 Intent................................................................................................................................................................72
10.3 Message Usage. ...............................................................................................................................................73
10.4 Stream 0 and Function 0..................................................................................................................................73
10.5 Stream 1 Equipment Status..............................................................................................................................73
10.6 Stream 2 Equipment Control and Diagnostics ................................................................................................80

SEMI E5-0709 © SEMI 1982, 2009 2
10.7 Stream 3 Materials Status................................................................................................................................99
10.8 Stream 4 Material Control.............................................................................................................................113
10.9 Stream 5 Exception Handling........................................................................................................................127
10.10 Stream 6 Data Collection ............................................................................................................................132
10.11 Stream 7 Process Program Management. ...................................................................................................142
10.12 Stream 8 Control Program Transfer ...........................................................................................................159
10.13 Stream 9 System Errors ...............................................................................................................................160
10.14 Stream 10 Terminal Services.......................................................................................................................163
10.15 Stream 11 Host File Services (Deleted).......................................................................................................165
10.16 Stream 12 Wafer Mapping...........................................................................................................................166
10.17 Stream 13 Data Set Transfers......................................................................................................................178
10.18 Stream 14 Object Services...........................................................................................................................190
10.19 Stream 15 Recipe Management ...................................................................................................................210
10.20 Steam 16 Processing Management..............................................................................................................238
10.21 Stream 17 Equipment Control and Diagnostics. .........................................................................................254
10.22 Stream 18 Subsystem Control and Data......................................................................................................260
10.23 Stream 19 Recipe and Parameter Management ..........................................................................................265
11 Message Documentation.......................................................................................................................................275
11.1 Intent..............................................................................................................................................................275
11.2 Standard Form SECS-II Document ...............................................................................................................275
12 Units of Measure ..................................................................................................................................................276
12.1 Intent..............................................................................................................................................................276
12.2 Units Symbols................................................................................................................................................276
12.3 Compliance....................................................................................................................................................277
12.4 SECS-II Units of Measure Identifiers. ...........................................................................................................278
RELATED INFORMATION 1 .................................................................................................................................284
R1-1 The General Node Transaction Protocol.......................................................................................................284
R1-2 Some Suggested Message Usage..................................................................................................................284
R1-3 Notes on SECS-II Data Transfers.................................................................................................................284
R1-4 Process Programs..........................................................................................................................................287
R1-5 Suggested Baseline SECS Equipment Implementation ................................................................................291

3 SEMI E5-0709 © SEMI 1982, 2009
1 Purpose
1.1 The SEMI Equipment Communications Standard Part 2 (SECS-II) defines the details of the interpretation of
messages exchanged between intelligent equipment and a host. This specification has been developed in cooperation
with the Japan Electronic Industry Development Association Committee 12 on Equipment Communications.
1.1.1 It is the intent of this standard to be fully compatible with SEMI E4 — Equipment Communications Standard
(SECS-I). It is also the intent to allow for compatibility with alternative message transfer protocols. The details of
the message transfer protocol requirements are contained in § 6.
1.1.2 It is the intent of this standard to define messages to such a level of detail that some consistent host software
may be constructed with only minimal knowledge of individual equipment. The equipment, in turn, may be
constructed with only minimal knowledge of the host.
1.1.3 The messages defined in the standard support the most typical activities required for IC manufacturing. The
standard also provides for the definition of equipment-specific messages to support those activities not covered by
the standard messages. While certain activities can be handled by common software in the host, it is expected that
equipment-specific host software may be required to support the full capabilities of the equipment.
2 Scope
2.1 SECS-II gives form and meaning to messages exchanged between equipment and host using a message transfer
protocol, such as SECS-I.
2.1.1 SECS-II defines the method of conveying information between equipment and host in the form of messages.
These messages are organized into categories of activities, called streams, which contain specific messages, called
functions. A request for information and the corresponding data transmission is an example of such an activity.
2.1.2 SECS-II defines the structure of messages into entities called items and lists of items. This structure allows for
a self-describing data format to guarantee proper interpretation of the message.
2.1.3 The interchange of messages is governed by a set of rules for handling messages called the transaction
protocol. The transaction protocol places some minimum requirements on any SECS-II implementation.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 SECS-II applies to equipment and hosts used in the manufacturing of semiconductor devices. Examples of the
activities supported by the standard are: transfer of control programs, material movement information, measurement
data, summarized test data, and alarms.
3.1.1 The minimum compliance to this standard involves meeting the few constraints outlined in § 8. It is expected
that a given piece of equipment will require only a subset of the functions described in this standard. The number of
functions and the selection of functions will depend upon the equipment capabilities and requirements. For each
piece of equipment, the exact format for each function provided must be documented according to the form outlined
in § 10.
3.1.2 It is assumed that the equipment will define the messages used in a particular implementation of SECS-II. It is
assumed the host will support equipment implementation.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E6 — Guide for Semiconductor Equipment Installation Documentation
SEMI E148 — Specification for Time Sychronization and Definition of the TS-Clock Object

SEMI E5-0709 © SEMI 1982, 2009 4
4.2 ANSI Standard
1
ANSI X3.4-1977 — Code for Information Interchange (ASCII)
4.3 IEEE Standard
2
IEEE 754 — Standard for Binary Floating Point Arithmetic
4.4 The Japan Electronic Industry Development Association (JEIDA) has requested that the SECS-II standard
incorporate support for the JIS-8 codes for data exchange. This code would allow support for katakana characters in
Japanese implementations of SECS-II.
JIS-6226 — JIS 8-bit Coded Character Set for Information Interchange, Japanese Industrial Standards.
3
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Definitions
5.1.1 The following brief definitions refer to sections providing further information.
5.1.2 block — a physical division of a message used by the message transfer protocol (see § 6.3).
5.1.3 conversation — a sequence of related messages (see § 8.4).
5.1.4 conversation timeout — an indication that a conversation has not completed properly (see § 8.4.1).
5.1.5 device ID — a number between 0 and 32767 used in identifying the particular piece of equipment
communicating with a host (see § 6.4.1).
5.1.6 equipment — the intelligent system which communicates with a host.
5.1.7 function — a specific message for a specific activity within a stream (see § 7.2).
5.1.8 host — the intelligent system which communicates with the equipment.
5.1.9 interpreter — the system that interprets a primary message and generates a reply when requested (see § 6.2).
5.1.10 item — a data element within a message (see § 9.2).
5.1.11 item format — a code used to identify the data type of an item (see § 9.2).
5.1.12 list — a group of items (see § 9.3).
5.1.13 message — a complete unit of communication (see § 6.2).
5.1.14 message header — information about the message passed by the message transfer protocol (see § 6.4).
5.1.15 multi-block message — a message sent in more than one block by the message transfer protocol (see § 6.3.2).
5.1.16 originator — the creator of a primary message (see § 6.2).
5.1.17 packet — a physical division of a message used by the message transfer protocol (see § 6.3).
5.1.18 primary message — an odd numbered message. Also, the first message of a transaction (see § 6.2 and § 7.2).
5.1.19 reply — the particular secondary message corresponding to a primary message (see § 6.2 and § 7.2).
5.1.20 secondary message — an even-numbered message. Also the second message of a transaction (see § 6.2 and
§ 7.2).
1 American National Standards Institute, Headquarters: 1819 L Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020; Fax:
202.293.9287, New York Office: 11 West 42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900; Fax: 212.398.0023;
http://www.ansi.org
2 Institute of Electrical and Electronics Engineers, IEEE Operations Center, 445 Hoes Lane, P.O. Box 1331, Piscataway, New Jersey 08855-
1331, USA. Telephone: 732.981.0060; Fax: 732.981.1721; http://www.ieee.org
3 Japanese Industrial Standards. Available through the Japanese Standards Association, 1-24, Akasaka 4-Chome, Minato-ku, Tokyo 107-8440,
Japan. Telephone: 81.3.3583.8005; Fax: 81.3.3586.2014; http://www.jsa.or.jp

5 SEMI E5-0709 © SEMI 1982, 2009
5.1.21 single-block message — a message sent in one block by the message transfer protocol (see § 6.3.1).
5.1.22 stream — a category of messages (see § 7.1).
5.1.23 transaction — a primary message and its associated secondary message, if any (see § 8.2).
5.1.24 transaction timeout — an indication from the message transfer protocol that a transaction has not completed
properly (see § 6.5).
6 The Message Transfer Protocol
6.1 Intent — SECS-II is fully compatible with the message transfer protocol defined by SECS-I. It is the intent of
this standard to allow for compatibility with alternative message transfer protocols. The purpose of this section is to
define the requirements of the interaction between an application using SECS-II and the message transfer protocol.
The methods used to implement these requirements are not covered as a part of this standard. The terms used in this
standard are those used by SECS-I. Equivalent terms may be different for other message transfer protocols.
6.2 Messages — The message transfer protocol is used to send messages between equipment and host. The message
transfer protocol must be capable of sending a primary message, indicating whether a reply is requested; and, if a
reply is requested, it must be capable of associating the corresponding secondary message or reply message with the
original primary message. The term originator will refer to the creator of the original primary message. The term
interpreter will refer to the entity that interprets the primary message at its destination and generates a reply when
requested.
6.3 Blocking Requirements — The message transfer protocol must support the following SECS-II message blocking
requirements.
6.3.1 Single-Block Messages — SECS-II requires that certain messages be sent in a single block or single packet by
the message transfer protocol. Those messages defined in this standard as single-block SECS-II messages must be
sent in a single-block or packet. The method used by the application software to tell the message transfer protocol
that a particular message must be sent as a single block is not covered as part of this standard. For compatibility with
SECS-I, the maximum length allowed for a single-block SECS-II message is 244 bytes. The minimum requirement
for the message transfer protocol is to be able to send single-block SECS-II messages.
6.3.2 Multi-Block Messages — For compatibility with SECS-I, SECS-II messages that are longer than 244 bytes are
referred to as multi-block messages. Also, certain SECS-II messages are allowed to be multi-block messages even if
they otherwise meet the single-block length requirements. Certain older implementations may impose application-
specific requirements on block sizes for certain incoming messages. Beginning with the 1988 revision of the
standard, new applications may not impose application-specific requirements on incoming block sizes. Applications
implemented before 1988 may impose such requirements.
6.4 Message Header — The message transfer protocol must provide the following information, called the message
header, with every message. Only the content of the message header is defined by this standard. The exact format of
the message header passed between the application and the message transfer protocol is not covered as part of this
standard.
NOTE 1: In SECS-I, this information is contained in the 10 byte header of each block of a message.
6.4.1 Device ID — The message transfer protocol must be capable of identifying the device ID (0–32767) which
indicates the source or destination of a message.
6.4.2 Stream and Function — The message transfer protocol must be capable of identifying to SECS-II a
minimum15 bit message identification code. In SECS-II, messages are identified by a stream code (0–127, 7 bits)
and a function code (0–255, 8 bits). Each combination of stream and function represents a distinct message
identification.
6.4.3 Reply Requested — The message transfer protocol must be capable of identifying whether a reply is requested
to a primary message.
6.5 Transaction Timeout — It is presumed that the message transfer protocol will notify SECS-II in the event of
failure to receive an expected reply message within a specified transaction timeout period.
NOTE 2: In SECS-I, a transaction timeout occurs if either the reply timeout (T3) is exceeded before the first block of a reply
message is received or if the interblock timeout (T4) is exceeded before an expected block of a multi-block message is received.
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