Summary of the de-embedding methods
Whit the CMOS technology moving forward and dimension of device
shrinking，parasitics of test structure have a significant impact on the
measurements。In order to get the only DUT data which is very
important for IC designers and engineers，we have to subtract the
parasitics of Pads and interconnect from the measured data。This is the
de-embedding process。In this summary ，I will generalize about ten
popular and often used de-embedding methods proposed during the
passed 20 years。First I classify these methods into five categories：
one-step，two-step，three-step，four-step and mixture。Below I will show
the equivalent models and specific derivation process of every methods。
1、ONE-STEP:
1）open without coupling of 2 signal pads：
There only one open test structure is needed and also only one time
measurement。Fig.1-1 shows the open test structure and equivalent
model。
Fig.1-1.The open test structure and equivalent model
Yp in the equivalent model denotes the coupling between pads and
DUT
Yp
(a)
(b)
(c)
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