Journal of Computer and Communications, 2018, 6, 215-221
http://www.scirp.org/journal/jcc
ISSN Online: 2327-5227
ISSN Print: 2327-5219
DOI:
10.4236/jcc.2018.612021 Dec. 30, 2018 215 Journal of Computer and Communications
Summary of Research Status and Application of
MEMS Accelerometers
Weimeng Niu, Liqing Fang
*
, Lei Xu, Xu Li, Ruikun Huo, Deqing Guo, Ziyuan Qi
Army Engineering University Shijiazhuang Campus, Shijiazhuang, China
Abstract
The rapid development of MEMS technology has made MEMS accelerome-
ters mature and the application range has been expanded. Many kinds of
MEMS accelerometers are researched.
According to the working principle of
MEMS accelerometer, it can be divided into: piezoresistive, piezoelectric, ca-
pacitive, tunnel, resonant, electromagnetic, thermocouple, optical, inductive,
etc. Due to its outstanding features in terms of size, quality, power consump-
tion and reliability, MEMS sensors are used in military applications and
where high environmental resistance is required.
MEMS accelerometers are
developing rapidly and have good application prospects
. In order to make
MEMS accelerometers more widely understood, the advantages of MEMS ac-
celerometers are expounded. The research status
of MEMS accelerometers is
introduced, and MEMS are analyzed. The application of accelerometers in
real-world environments, and the development trend of MEMS accelerome-
ters in the future.
More scholars will invest in MEMS accelerometer research,
pursuing high performance, low power consumption, high precision, mul-
ti-
function, and interaction. Strong MEMS accelerometers will be ubiquitous
in the future.
Keywords
MEMS Technology, MEMS Accelerometer
1. Introduction
The sensor based on MEMS technology is generally a highly integrated sensor
system integrating micro-mechanical and micro-electronic functions, which is
made of silicon-based materials and semiconductor integrated circuit manufac-
turing process. It has remarkable small size, light weight and low power con-
sumption. Low cost, high reliability, strong resistance to vibration and shock,
How to cite this paper:
Niu, W.M., Fang
,
L
.Q., Xu, L., Li, X., Huo, R.K., Guo, D.Q.
and
Qi, Z.Y. (2018)
Summary of Research
Status and Application of MEMS Accel
e-
rometers
.
Journal of Computer and Co
m-
munications
,
6
, 215-221.
https:
//doi.org/10.4236/jcc.2018.612021
Received:
December 19, 2018
Accepted:
December 27, 2018
Published:
December 30, 2018
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