SEMI E87-0301：半导体行业CMS标准规范

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"SEMI E87-0301是半导体行业中的一项标准，主要涉及载体管理（Carrier Management System，CMS）的规范。这个规范由全球信息与控制委员会技术批准，并由北美信息与控制委员会负责。它规定了主机与生产设备在自动化和手动载具传输过程中的通信行为，包括与设备内部缓冲区的交互。标准最初发布于1999年9月，2000年进行了更新，并计划于2001年3月正式出版。由于集成设备与自动化物料处理系统（AMHS）实施的不成熟，该标准被标记为临时性，可能会有额外的规范进行补充和完善。" SEMI E87-0301是半导体制造领域的一个关键标准，它定义了在半导体生产线中，主机系统（Host System）如何与生产设备进行交互，以管理300mm晶圆的载具（carrier）传输。这个规范的主要目的是确保在自动化和手动操作过程中，设备与主机之间的通信标准化，从而提高生产效率和设备间的兼容性。 1. **目的（Purpose）** 1.1 主要目标是为生产设备与主机系统间的通信设定统一的行为准则，这涵盖了从协调、执行到完成载具在设备内外以及内部缓冲区之间的自动和手动转移的整个流程。通过这种方式，可以确保设备操作的顺畅性和一致性。 2. **范围（Scope）** 2.1 SEMI E87-0301是一个临时标准，主要针对300mm晶圆的装载端口（loadport）的主机和设备通信。由于当时集成设备与自动化物料处理系统的实现还不够成熟，所以标准设为临时状态。这意味着随着技术的发展，可能需要进一步的扩展或修订来适应新的需求和挑战。这个规范的实施对于半导体制造业至关重要，因为它促进了设备间的互操作性，降低了生产过程中的错误和停机时间，同时也为制造商提供了一套通用的接口，减少了开发新设备或升级现有设备时的复杂性。随着AMHS技术的不断发展，SEMI E87-0301的标准也会不断更新，以保持与行业的同步发展。

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SEMI E87-0301 © SEMI 1999, 200111

10.3.4 Carrier Attribute Definition Table

Table 6 Carrier Attribute Definition

Attribute Name Definition Access Reqd Form

ObjType Object type. RO Y Text 1 to 40 characters equal to “Carrier”.

ObjID Object identifier. RO Y Text 1 to 80 characters equal to the CarrierID.

Capacity Maximum number of substrates in

carrier.

RO Y Positive integer.

SubstrateCount The number of substrates currently

in the carrier.

RO Y Non negative integer less than or equal to the

Capacity.

CarrierIDStatus Current state of the carrier ID

verification.

RO Y Enumerated:

ID NOT READ, ID READ, ID

VERIFICATION OK, ID VERIFICATION

FAILED.

CarrierAccessingStatus The current accessing state of the

carrier by the equipment. The

current substate of the

CarrierAccessingStatus state model.

RO Y Enumerated:

NOT ACCESSED, IN ACCESS, CARRIER

COMPLETE, CARRIER STOPPED

ContentMap list of lot and substrate identifiers,

corresponding to slot 1,2,3……n

RO Y List of n structures, where n is equal to the value

of "Capacity" above, and each structure consists

of a LotID and a SubstrateID:

1 (LotID, SubstrateID)

n (LotID, SubstrateID).

The first number in the list should correspond to

the slot number.

When the LotID is not provided by the host, the

enumeration for LotID should be null, so the

structure should be n (“”, SubstrateID).

When a slot has no substrate the structure

should be n (“”, “”).

LocationID Identifier of current location. RO Y Text 1 to 80 characters.

SlotMap List of slot status as provided by the

host until a successful slot map

read, then as read by the equipment.

RO Y List of 1 to n where n is less than or equal to the

value of “Capacity” above

1. Enumerated

n. Enumerated

Enumerated:

UNDEFINED, EMPTY, NOT EMPTY,

CORRECTLY OCCUPIED, DOUBLE

SLOTTED, CROSS SLOTTED. (NOT EMPTY

is included for equipment that cannot detect

incorrectly slotted substrates.)

SlotMapStatus Current state of slot map

verification.

RO Y Enumerated:

SLOT MAP NOT READ, SLOT MAP READ

SLOT MAP VERIFICATION OK, SLOT MAP

VERIFICATION FAILED.

Usage The type of material contained in

the carrier (i.e., TEST, DUMMY,

PRODUCT, FILLER, etc.).

RO Y Text as defined by the Equipment.

NOTE 1: NOT EMPTY is included to indicate presence for equipment that is only able to detect wafer presence but not correct positioning of the

wafer slot. For equipment that can detect incorrect positioning such as cross-slotted or double slotted, NOT EMPTY may not be applicable.

SEMI E87-0301 © SEMI 1999, 2001 12

10.3.5 Rules for Carrier Attributes

• The equipment shall change object attributes,

Capacity, ContentMap, SlotMap, Substrate count

and Usage, provided by the host. All other

attributes, such as LocationID, shall be set and

maintained by the equipment.

• The attributes, Capacity, ContentMap,, Substrate

count and Usage, shall be provided with Bind,

CarrierNotification, or ProceedWithCarrier service

before or when SlotMap is provided.

• The SlotMap shall be provided with Bind,

CarrierNotification, or ProceedWithCarrier to

verify CarrierID, when the SlotMap verification is

equipment based. And it shall not be provided

when the SlotMap verification is host based.

• Carrier properties may be provided before the

carrier arrives as part of the Bind service and

should be retained until either a CancelBind service

is received or the carrier is removed.

• Carrier properties may also be provided by the

ProceedWithCarrier service. The carrier properties

that are provided by the ProceedWithCarrier

service may differ based whether or not the object

is instantiated by the service.

• Carrier properties that are required shall be actively

updated by the equipment.

10.3.6 Carrier Location

10.3.6.1 A carrier location, signified by LocationID, is

used for tracking carriers as they move through the

equipment. A carrier location is any physical area that

is capable of holding a carrier. It is not intended to

represent entire mechanisms, which may have a variety

of other properties of interest, but only that portion

where a Carrier may rest.

10.3.7 Carrier Location Examples

10.3.7.1 Carrier Locations include load port locations,

substrate port locations, internal buffer locations, as

well as grippers, conveyors, and elevators that are used

internally for moving the carrier from one fixed

location to another.

10.4 Carrier Location Naming

10.4.1 Carrier locations shall be assig ned a unique

name. Information about the carrier location can be ob-

tained by querying the CarrierObject for the LocationID

or by asking the equipment for the CarrierLocation-

Matrix. The text form of the LocationID shall be

descriptive of the location. For example, LocationID

form for load port load/unload location might be “LPn”,

where “n” equal is equal to the load port number (the

load port number is determined through the numbering

rule in Section 9.1). The LocationID form for the FIMS

port location might be “FIMSn”. The LocationID form

for a buffer location might be “BUFn”.

10.5 Load Port Carrier Locations

10.5.1 For fixed buffer equipment co nfigured to

handle FOUPs, a Load Port has two different Carrier

Locations. One represents the place where a Carrier is

delivered and picked up, while the other represents the

place where the Carrier is docked and can be opened.

10.6 Carriers Between Locations

10.6.1 When the carrier is traveling from one location

to another, the location attribute remains equal to the

source location until the carrier movement is complete

and the carrier is resting at the new carrier location (the

destination location).

10.6.2 Usage

10.6.2.1 The Usage parameter indicates the type of

substrate the carrier contains. All Usage values are

equipment specific values. Some internal buffer

equipment manages carriers by establishing logical

partitions. This type of equipment shall use the Usage

parameter to determine which logical partition where

the carrier is held. The Usage parameter can also be

used in conjunction with CarrierProcessingStatus.

10.6.3 Carrier Capacity Status

10.6.3.1 The Carrier Capacity Status parameter can be

sent to the equipment by the host in either the Bind

service or the ProceedWithCarrier service. However the

equipment shall update this parameter based on the

results of the read slot map operation. Furthermore, the

equipment shall update the parameter based on it’s own

actions of adding and removing a substrate to and from

a carrier. If the equipment does not know the value of

CarrierCapacity prior to instantiation, the equipment

shall instantiate the carrier object with the value of

UNDEFINED for CarrierCapacity.

10.6.4 Lot information for ContentMa p

10.6.4.1 Lot is defined in SEMI E90 as a group of one

or more substrates of the same type. It is organized

external to the equipment. The Lot ID is the identifier

of this group. If the equipment is informed of the Lot

ID to which a substrate belongs, the equipment must

maintain this information.

10.6.5 Carrier Accessing Status

10.6.5.1 The CarrierAccessingStatus is used by the

host to know whether or not the carrier owned by the

equipment can be moved out. If the carrier is within the

internal buffer equipment, this status may be used by

the host to issue CarrierOut service.

SEMI E87-0301 © SEMI 1999, 2001 14

10.7.3 Carrier State Definitions

10.7.3.1 CARRIER — The CARRIER s tate has two

ANDed (orthogonal) substates: CARRIER ID READ

and CARRIER SLOT MAP READ.

10.7.3.2 CARRIER ACCESSING STATUS — This is a

substate of CARRIER and indicates the current

accessing status of the carrier. It has four substates,

NOT ACCESSED, IN ACCESS, CARRIER

COMPLETE, and CARRIER STOPPED. The initial

default entry substate is NOT ACCESSED.

10.7.3.2.1 NOT ACCESSED — This is a substate of

CARRIER ACCESSING STATUS and is active when

access by the equipment to the carrier has not been

started. The carrier can be moved out.

10.7.3.2.2 IN ACCESS — This is a substa te of

CARRIER ACCESSING STATUS and is active when

access by the equipment to the carrier has been started

but has not been finished, and the carrier should not be

moved out.

10.7.3.2.3 CARRIER COMPLETE — This is a

substate of CARRIER ACCESSING STATUS and is

active when the access by the equipment to the carrier

has been finished, and the carrier should be moved out.

This is a final state.

10.7.3.2.4 CARRIER STOPPED — This is a substate

of CARRIER ACCESSING STATUS and is active

when the access by the equipment to the carrier has

been stopped abnormally, and the carrier should be

moved out. This is a final state.

10.7.3.3 CARRIER ID STATUS — This is a substate of

CARRIER and indicates the current status of the carrier

with respect to its identifier. It has four substates, ID

NOT READ, WAITING FOR HOST, ID

VERIFICATION FAILED, ID VERIFICATION OK.

The initial substate is conditional based on information

the equipment has about the carrier. When the

carrierID is provided by the Bind or the Carrier

Notification service, the carrier object shall be

instantiated in the ID NOT READ substate. When the

carrierID is provided by the carrier ID read, the carrier

shall be instantiated in the WAITING FOR HOST

substate. When the Carrier is instantiated by the

ProceedWithCarrier service, the carrier shall be

instantiated in the ID VERIFICATION OK substate.

Finally when the carrier is instantiated by the

CancelCarrier service, the carrier will be instantiated in

the ID VERIFICATION FAILED substate.

10.7.3.3.1 ID NOT READ — This is a su bstate of

CARRIER ID STATUS. This state is active whenever

the CarrierID has not been read by the equipment.

10.7.3.3.2 ID VERIFICATION FAILED — This is a

substate of CARRIER ID STATUS and is active when

the carrierID has verification by the host with the

CancelCarrier service. This is a final state.

10.7.3.3.3 ID VERIFICATION OK — This is a

substate of CARRIER ID STATUS and is active as

soon as the CarrierID has been accepted. The ID is

determined to be accepted by either successful

verification by the equipment or the host, or by

bypassing ID read because a carrier ID reader is not

available and the BypassReadID variable is set to true.

This is a final state.

10.7.3.3.4 WAITING FOR HOST — This is a substate

of CARRIER ID STATUS and is active during the

period of time when the carrierID has been read by the

equipment successfully or unsuccessfully and has not

yet been verified.

10.7.3.4 CARRIER SLOT MAP STATUS — This is a

substate of CARRIER and indicates the current status

of the carrier with respect to its slot map. It has four

substates, SLOT MAP NOT READ, WAITING FOR

HOST, SLOT MAP VERIFICATION FAILED, SLOT

MAP VERIFICATION OK. The initial default entry

sub-state is SLOT MAP NOT READ.

10.7.3.4.1 SLOT MAP NOT READ — Th is is a

substate of CARRIER SLOT MAP STATUS and is the

default entry state. It is active when the Carrier is first

loaded at the equipment until the Slot Map has been

read successfully by the equipment at the Substrate

Port.

10.7.3.4.2 SLOT MAP VERIFICATION FAIL — This

is a substate of CARRIER SLOT MAP STATUS and is

active when the Slot Map has been read by the

equipment and has failed verification by the host. This

is a final state.

10.7.3.4.3 SLOT MAP VERIFICATION OK — This is

a substate of CARRIER SLOT MAP STATUS and is

active as soon as the slot map has been verified. This is

a final state.

10.7.3.4.4 WAITING FOR HOST — This is a substate

of CARRIER SLOT MAP STATUS and is active when

the equipment is waiting for input from the host.

10.7.4 Carrier State Transition Table

10.7.4.1 Table 7 indicates the triggers a nd the

expected behavior of the instantiated carrier object.

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