大口径压电陶瓷可变形镜在高功率激光校正中的应用

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"Wide aperture piezoceramic deformable mirrors for aberration correction in high-power lasers" 这篇研究论文聚焦于在高功率激光系统中用于校正像差的宽孔径压电陶瓷可变形镜的设计与性能测试。标题中的"wide aperture"指的是这种可变形镜具有大的视场，能够覆盖更广的空间范围；"piezoceramic"是指采用压电陶瓷材料，这种材料能够将电信号转化为机械形变，从而改变镜子的形状；"deformable mirrors"即可变形镜，是光学系统中用于校正像差的重要元件；而"aberration correction"则是指通过调整可变形镜来修正光路中的像差，提高光学系统的成像质量。在描述中提到，研究团队开发了一款尺寸为410 mm × 468 mm的可变形镜，它由双层压电陶瓷板和多层压电陶瓷堆叠控制。"bimorph piezoceramic plates"指的是由两层不同极化方向的压电陶瓷组成的结构，能够提供更大的形变能力。"multilayer piezoceramic stacks"则可能是指多层堆叠的压电陶瓷，以实现更精细、更复杂的形状控制。通过测量所有驱动器（actuators）的响应函数，研究人员能够了解每个驱动器对镜面形状变化的贡献。此外，他们还使用了Fizeau干涉仪和Shack-Hartmann波前传感器来评估镜子的表面形状。Fizeau干涉仪是一种常用的光学测量工具，用于检测平面度和平坦度，而Shack-Hartmann波前传感器则可以测量光波前的畸变，从而量化像差。研究表明，这款可变形镜能够将表面的平坦度改善至残余粗糙度为0，这意味着在修正像差后，镜面的平整度达到了非常高的标准。这对于高功率激光系统来说至关重要，因为高功率激光的传播对光学组件的表面质量和精度有着极高的要求。这些高性能的可变形镜能够在高功率激光应用中，如激光切割、激光焊接、激光打标以及激光核聚变实验等，有效提升光束质量，减少能量损失，增强系统的稳定性。论文发表在《High Power Laser Science and Engineering》2016年第4卷第4期，是开放获取的，遵循Creative Commons Attribution许可证，允许在遵守一定条件下自由使用。文章的DOI为10.1017/hpl.2016.3，作者包括Vadim Samarkin, Alexander Alexandrov, Gilles Borsoni, Takahisa Jitsuno, Pavel Romanov, Aleksei Rukosuev和Alexis Kudryashov，他们分别来自俄罗斯莫斯科国立机械工程大学(MAMI)，法国AKAOptics SAS和日本大阪大学的激光工程研究所。这篇研究工作展示了在高功率激光系统中，通过使用创新的压电陶瓷可变形镜技术，能够实现精确的像差校正，这对于提升整个系统的性能和效率具有重要意义。

High Power Laser Science and Engineering, (2016), Vol. 4, e4, 7 pages.

Creative Commons Attribution licence <http://creativecommons.org/licenses/by/3.0/>.

doi:10.1017/hpl.2016.3

Wide aperture piezoceramic deformable mirrors for

aberration correction in high-power lasers

Vadim Samarkin

, Alexander Alexandrov

, Gilles Borsoni

, Takahisa Jitsuno

, Pavel Romanov

Aleksei Rukosuev

, and Alexis Kudryashov

1,2

Moscow State University of Mechanical Engineering (MAMI), B. Semenovskaya 38, Moscow 107023, Russia

AKA Optics SAS, 2 rue Marc Donadille, Marseille 13013, France

Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan

(Received 1 December 2015; revised 31 December 2015; accepted 14 January 2016)

Abstract

The deformable mirror with the size of 410 mm× 468 mm controlled by the bimorph piezoceramic plates and multilayer

piezoceramic stacks was developed. The results of the measurements of the response functions of all the actuators and of

the surface shape of the deformable mirror are presented in this paper. The study of the mirror with a Fizeau interferometer

and a Shack–Hartmann wavefront sensor has shown that it was possible to improve the ﬂatness of the surface down to

a residual roughness of 0.033 µm (RMS). The possibility of correction of the aberrations in high-power lasers was

numerically demonstrated.

Keywords: deformable mirror; high-power laser; piezoelectric actuator; wavefront sensor

1. Introduction

There are various solid-state pulse lasers based on Nd:glass

with the output beam power of the PW level, such as

the National Ignition Facility (NIF) in the United States,

the MEGAJOULE (LMJ) in France, the SHENGUAN III

in China, the LFEX in Japan, the Lutch in Russia, etc.

The increasing of the laser pumping power leads to an

increase of the inhomogeneities in the active media and

the distortions of the reﬂective and refractive surfaces of

the optical elements primarily due to heating. As a result,

the wavefront of the output beam is distorted signiﬁcantly.

The spectrum of the distortions of the phase and of the

amplitude in the high-power lasers has been observed for the

wide range of the spatial frequencies k ≈ 1 × 10

–2.5 ×

−3

−1

and, correspondingly, spatial lengths ranging

from 0.01 to 400 mm

[1, 2]

. The high-frequency components

of the aberrations are usually removed with spatial ﬁlters

in the optical ampliﬁers. The local tilts of the wavefront

(wavefront aberrations), with spatial lengths ranging from 33

to 400 mm, determine the divergence and as a consequence,

determine the possibility to obtain a diffraction limited focus

spot. To obtain the beam intensities of ∼10

+22

W/cm

and

Correspondence to: V. Samarkin, Moscow State University of

Mechanical Engineering (MAMI), B. Semenovskaya 38, Moscow, 107023

Russia. Email: samarkin@nightn.ru

more at the target–laser interaction spot, the large scale

and the low-frequency wavefront aberrations have to be

corrected. This is only possible with adaptive optical sys-

tems. Moreover, nowadays an adaptive optical system is

mandatory in a high-power laser system.

Of course, the deformable mirror is the main element

of any adaptive optical system. The parameters of the

deformable mirror (size, precision of correction, resolution,

laser induced damage threshold, etc.) are very important for

the operation of the system. Correction efﬁciency depends

ﬁrst of all on the technology implemented on the deformable

mirror. Different measurements performed in high-power

lasers have shown that the real wavefront aberrations are

mainly low-order ones

[3]

. Therefore, deformable mirrors

for lasers have to be adapted to correct exactly for such

aberrations.

A deformable mirror with an optical surface size of

400 mm × 400 mm was developed for the NIF laser, in

which 39 PMN actuators were used as active elements

[4]

. A

220 mm × 220 mm deformable mirror with 61 piezoelectric

stacks with the same design has been developed for the

Russian laser complex ‘Lutch’

[5]

. Such mirrors have shown

a high efﬁciency in correcting the wavefront of high-power

pulsed lasers. However, the stroke of the piezoelectric stack

actuators vary with their position below the mirror surface:

their stroke at the corner of the mirror and on the external

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