Preliminary
Datasheet
SLQ-HC60
Milliliter Flow Meter for Hydrocarbons
www.sensirion.com May 2009 Preliminary Information _ V0.83 1/6
1 Introduction SLQ-HC60
The SLQ-HC60 Liquid Flow Meter enables fast, non invasive measurements of liquid flow up to 80 ml/min. This
product line is especially suited for process monitoring applications in automation technology which require high
sensitivity in the milliliter range. It is suited for use with almost all hydrocarbons, as for example, alcohols, oils,
gasoline, diesel, etc. and many other chemicals. Excellent chemical resistance is ensured: The flow path of the SLQ-
HC60 Liquid Flow Meters is formed by a simple, straight glass capillary. This Swiss made, non invasive flow meter is
based on Sensirion’s patented CMOSens
®
Technology (US Patent 6,813,944 B2). An internal fourth generation
MEMS sensor chip combines a thermal high precision sensor element with amplification circuits and digital
intelligence for linearization and temperature compensation on one single microchip – the product’s core element.
2 Sensing Performance
In Table 1 the flow sensor’s performance for use with Isopropyl Alcohol (IPA) is given. For other hydrocarbons the
values will be slightly different as the performance depends on the medium used. Due to the optimized output signal
the repeatability is nearly constant over a wide flow range. The repeatability depends on the integration time
a
of the
analog signal acquisition. Longer integration time leads to better repeatability of the flow measurement (see table 1).
The temperature compensation is optimized for use with IPA and shows very good performance for most
hydrocarbons and other media.
Table 1: Model specific performance
of SLQ-HC60 for IPA (all data at 20°C, 1 bar
abs
unless otherwise noted)
Parameter Condition SLQ-HC60 Units
Best Performance 80
Maximum Flow Rate
Reduced Performance 100
ml/min
1.5 % m.v.
0.2 sec integration time
0.2 % F.S.
1 % m.v.
Repeatability
b
(whichever is greater)
2 sec integration time
0.07 % F.S.
Flow Detection Response Time < 50 ms
Accuracy
c
10 % m.v.
Response Time On Power-Up 120 ms
Mounting Orientation Sensitivity
d
For IPA 0.25 ml/min
Temperature Compensated +10…+40 °C
Operating Temperature
Functional +0 ... +55 °C
Ambient storage temperature (empty flow channel) -10…+60 °C
a
This refers to the time over which the analog acquisition device averages the input signal. Refer to the datasheet of your
device.
b
For medium IPA using 1 σ standard deviation of consecutive flow measurements.
c
With IPA, 2.5-80 ml/min, after conversion of the Vout signal via the logarithmic relation. See section 3.1
d
Normal position: Horizontal Flow channel, connector horizontally.
Maximum flows up to 80 ml/min
− Sensitive to lowest flows
− Straight flow path, no moving parts
− Fast response time: < 50 ms
− Optimized for hydrocarbons