Int. J. Advanced Mechatronic Systems, Vol. 4, Nos. 5/6, 2012 221
Copyright © 2012 Inderscience Enterprises Ltd.
Robust control of micro-positioning stage with
piezoceramic actuator
Yonghong Tan
College of Mechanical and Electronic Engineering,
Shanghai Normal University,
#100 Guilin Road, Shanghai 200234, China
E-mail: tany@shnu.edu.cn
Yangqiu Xie
School of Electronic Engineering,
Xi’dian University,
#2, South Taibai Street, Xi’an 710071, China
E-mail: yangqiu_xie@hotmail.com
Ruili Dong* and Hong He
College of Mechanical and Electronic Engineering,
Shanghai Normal University,
#100 Guilin Road, Shanghai 200234, China
E-mail: dongrlnpu@shnu.edu.cn
E-mail: heh@shnu.edu.cn
*Corresponding author
Abstract: A non-linear robust control strategy for piezoceramic actuator in a micro-positioning
stage is proposed in this paper. In order to describe the relations among the amplifier-filter
circuit, piezoceramic actuator and load, a sandwich model with hysteresis is developed. For the
compensation of hysteresis effect in piezoceramic actuator, the corresponding inverse model of
hysteresis is constructed. Then, a non-linear robust control strategy based on the sandwich model
with hysteresis is proposed. The experimental results show that the proposed control scheme has
obtained promising results.
Keywords: robust control; piezoceramic actuator; hysteresis.
Reference to this paper should be made as follows: Tan, Y., Xie, Y., Dong, R. and He, H. (2012)
‘Robust control of micro-positioning stage with piezoceramic actuator’, Int. J. Advanced
Mechatronic Systems, Vol. 4, Nos. 5/6, pp.221–229.
Biographical notes: Yonghong Tan received his BSc and MSc degrees from the South China
University of Technology, Guangzhou, China. In 1996, he obtained his PhD in Electrical
Engineering from the University of Ghent, Belgium. Then, he was a Postdoctoral Fellow at
Simon Fraser University, Canada. He has been a Visiting Professor respectively at Colorado
State University, USA, and Concordia University, Canada. He has also been a Professor at the
Guilin University of Electronic Technology and the University of Electronic Science and
Technology of China. Presently, he is a Full Professor at the College of Mechanical and
Electronic Engineering, Shanghai Normal University, China. His research interests are modelling
and control of non-linear systems, biomedical signal processing and intelligent control.
Yangqiu Xie received his MS degree from Guilin University of Electronic Technology, Guilin,
China. He is currently working towards his PhD degree jointly in the College of Information,
Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai, China, and the
School of Electronic Engineering, Xi’dian University, Xi’an, China. His research interests
include mechatronics, modelling, and control of non-linear systems.
Ruili Dong received both her BSc in Mechanical Engineering and MSc in Electrical Engineering
from Northwestern Polytechnical University, Xi’an, China. In 2009, she obtained her PhD degree
from the Department of Automation, Shanghai Jiaotong University, Shanghai, China. Presently,
she holds an Associate Professor position at the College of Mechanical and Electronic
Engineering, Shanghai Normal University. Her research interest is modelling and control for
non-linear dynamic systems.