高速SECS消息服务(HSMS)：SEMI E37标准详解

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"E37&E37.1&E37.2.pdf 是关于SEMI标准的系列文档，主要涉及高速SECS消息服务(HSMS)。这些标准在半导体制造自动化领域有着重要的应用，旨在提高设备间通信的速度和效率。E37标准是HSMS通用服务的规范，而E37.1则是关于高速SECS消息服务单选模式(HSMS-SS或HSMS-SSS)，E37.2则规定了高速SECS消息服务的一般会话(HSMS-GS)。" 详细知识点： 1. SEMI E37标准： SEMI E37是半导体设备和材料国际（SEMI）制定的一套标准，其中的E37-0303版本详细定义了高速SECS消息服务(HSMS)的通用服务。此标准旨在促进不同制造商之间的设备连接和互操作性，无需了解对方的具体实现细节。 2. 高速SECS消息服务(HSMS)： HSMS是一种通信接口，设计用于半导体行业中计算机之间的高速消息交换。它的目标是替代SEMI E4（SECS-I），在需要更高通信速度或点对点拓扑不足以满足需求的场景下使用。同时，HSMS也是对SEMI E13（SECS消息服务）的补充，特别是在TCP/IP网络环境下更受青睐。 3. SEMI E37.1： SEMI E37.1-0702标准定义了高速SECS消息服务单选模式(HSMS-SS或HSMS-SSS)。这个模式专注于单个选定会话的操作，可能适用于需要高效、低延迟通信的特定设备交互场景。 4. SEMI E37.2： SEMI E37.2-95 (Reapproved 0303) 是高速SECS消息服务一般会话(HSMS-GS)的标准。这个部分描述了一种通用的通信协议，适合于多种设备间的消息传递，为整个HSMS框架提供基础。 5. HSMS的应用与扩展： HSMS被设计为可以与其他子标准一起使用，这些子标准进一步详细说明其使用细节或在特定应用领域施加限制。这使得HSMS能够适应不同的工厂自动化环境和特定的制造需求。 6. 目的与范围： HSMS的主要目的是提高通信效率，特别是在需要高速传输和简单点对点结构不适用的情况下。其范围涵盖了半导体制造中计算机系统间的通信接口，用于消息的高效传输和处理。 E37系列标准是半导体制造自动化中的关键通信协议，它们定义了高速数据交换的规则和框架，确保了不同设备间的无缝协作。通过理解并实施这些标准，制造商可以优化生产线的效率，提高生产质量。

SEMI E37-0303 © SEMI 1995, 2003 6

entity indicates successful completion of the

connect procedure, and the CONNECTED state is

entered (Section 5).

These procedures are carried out through the API of the

local entity' s implementation of TCP/IP. The appendix

provides the API-specific procedures for the above

steps using both TLI and BSD.

NOTE: A failure may occur during the above steps. The

reason for failure may be local entity-specific or may be due

to a lack of any accept message after a local entity-specific

timeout. The action to be taken is a local entity-specific issue.

If, however, the local entity intends to retry the connection, it

should do so subject to the T5 connect separation timeout (see

“Special Considerations”).

6.4 Terminating a TCP/IP Connection — Connection

termination is the logical inverse of Connection

establishment. From the Local Entity' s perspective, a

TCP/IP connection may be broken at any time.

However, HSMS only permits termination of the

connection when the connection is in the NOT

SELECTED substate of the CONNECTED state.

The procedures for termination of a connection are

defined in RFC 793. Either entity may initiate

termination of the connection. The NOT CONNECTED

state is entered, indicating the end of HSMS

communications. The appendix illustrates the

procedures for both release and disconnect using the

TLI and BSD APIs.

7 HSMS Message Exchange Procedures

HSMS defines the procedures for all message exchange

between entities across the TCP/IP connection

established according to the procedures in the previous

section. As explained in the overview, once the

connection is established, the two entities establish

HSMS communications with the Select procedure.

Then data messages may be exchanged in either

direction at any time. When the entities wish to end

HSMS communications, the Deselect or Separate

procedure is used to end HSMS communications.

7.1 Sending and Receiving HSMS Messages — All

HSMS procedures involve the exchange of HSMS

messages. These messages are sent and received as

TCP/IP streams using the previously established

TCP/IP connection at standard priority. In particular,

the use of “Urgent” data is not supported under HSMS

(see RFC 793 for more information on send and receive

procedures).

The appendix gives examples of sending and receiving

HSMS messages using both TLI and BSD socket APIs.

7.2 Select Procedure — The Select procedure is used

to establish HSMS communications on a TCP/IP

connection using the Select.req and Select.rsp messages

in a control transaction.

Although HSMS permits Select at any time in the

CONNECTED state, subsidiary standards may further

require the connection to be in the NOT SELECTED

substate (see “Special Considerations”).

7.2.1 Initiator Procedure — The procedure followed

by the initiator is as follows.

1. The initiator of the select procedure sends the

Select.req message to the responding entity.

2. If the initiator receives a Select.rsp with a Select

Status of 0, The HSMS Select procedure completes

successfully and the SELECTED state is entered

(see Section 5).

3. If the initiator receives a Select.rsp with a non-zero

Select Status, the Select completes unsuccessfully

(no state transitions).

4. If the T6 timeout expires in the initiator before

receipt of a Select.rsp, it is considered a

communications failure (see “Special

Considerations”).

7.2.2 Responding Entity Procedure — The procedure

followed by the responding entity is as follows.

1. The responding entity receives the Select.req.

2. If the responding entity is able to accept the select,

it transmits the Select.rsp with a Select Status of 0.

The HSMS Select Procedure for the responding

entity is successfully completed, and the

SELECTED state is entered (see Section 5).

3. If the responding entity is unable to permit the

select, it transmits the Select.rsp with a non-zero

Select Status. The HSMS Select Procedure for the

responding entity completes unsuccessfully (no

state transitions).

7.2.3 Simultaneous Select Procedures — If the

subsidiary standards do not restrict the use of the Select,

it is possible that both entities simultaneously initiate

Select Procedures with identical SessionID’s. In such a

case, each entity will accept the other entity' s select

request by responding with a Select.rsp.

SEMI E37-0303 © SEM 1995, 2003 7

7.3 Data Procedure — HSMS data messages may be

initiated by either entity as long as the connection is in

the SELECTED state. Receipt of a data message when

not in the SELECTED state will result in a reject

procedure (see Section 7.7).

Data messages may be further defined as part of a data

transaction as either a “Primary” or “Reply” data

message. In a data transaction, the initiator of the

transaction sends a primary message to the responding

entity. If the Primary message indicates that a reply is

expected, a Reply message is sent by the responding

entity in response to the Primary.

The following types of Data Transactions are

supported:

1. Primary Message with reply expected and the

associated Reply Message.

2. Primary Message with no reply expected.

The specific procedures for these transactions are

determined by the application layer and are subject to

other standards (for example, E5 and E30 for GEM

equipment using SECS-II encoded messages).

The applicable upper layer standard is identified by the

message type. The type is determined from the specific

format defined in Section 8. The normal type for HSMS

messages is SECS-II text. Also refer to “Special

Considerations” concerning the T3 Reply Timeout.

7.4 Deselect Procedure — The Deselect procedure is

used to provide a graceful end to HSMS

communication for an entity prior to breaking the

TCP/IP connection. HSMS requires that the connection

be in the SELECTED state. The procedure is as

follows.

7.4.1 Initiator Procedure

1. The initiator of the Deselect procedure sends the

Deselect.req message to the responding entity.

2. If the initiator receives a Deselect.rsp with a

Deselect Status of 0, its Deselect procedure

terminates successfully. The NOT SELECTED

state is entered (see Section 5).

3. If the initiator receives a Deselect.rsp with a non-

zero Deselect Status, its Deselect procedure

terminates unsuccessfully. No state change occurs.

4. If the T6 timeout expires in the initiator before

receipt of a Deselect.rsp, it is considered a

communications failure (see “Special

Considerations”).

7.4.2 Responding Entity Procedure

1. The responding entity receives the Deselect.req

message.

2. If the responding entity is in the SELECTED state,

and if it is able to permit the Deselect, it responds

using the Deselect.rsp with a zero response code.

The responding entity' s Deselect procedure

completes successfully. The NOT SELECTED

state is entered (see Section 5).

3. If the responding entity is unable to permit the

Deselect, either because it is not in the SELECTED

state or because local conditions do not permit the

Deselect, it responds using the Deselect.rsp with a

non-zero response code. The responding entity' s

Deselect procedure terminates unsuccessfully. No

state change occurs.

7.4.3 Simultaneous Deselect Procedures — If the

subsidiary standards do not restrict the use of the

Deselect, it is possible that both entities simultaneously

initiate Deselect Procedures with identical SessionID’s.

In such a case, each entity will accept the other entity' s

Deselect request by responding with the deselect.rsp.

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