SEMI E30标准：通用制造设备通信与控制模型

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"SEMI E30.pdf 是一套标准，主要涵盖了半导体制造设备通信与控制的通用模型（GEM），以及特定设备模型的检查和审查（ISEM）和计量设备模型的规范。这个标准由全球信息与控制委员会技术批准，并由日本信息与控制委员会负责。该标准最新版在2003年8月8日由日本区域标准委员会批准，并计划在2003年11月发布。" SEMI E30标准详解： 1. 引言 SEMI E30标准的历史修订记录在1.1部分中详述，旨在定义其范围、意图和整体应用背景。标准的意图是提供一个通用框架，用于半导体生产设备的通信和控制。 2. 范围 GEM（Generic Model for Communications and Control of Manufacturing Equipment）标准的范围在1.2部分中明确，它规定了半导体制造设备如何与自动化系统进行高效通信和交互，以便实现生产过程的自动化控制。 3. 意图 1.3部分介绍了标准的主要目标，即建立一套标准接口，使不同制造商的设备能够无缝集成到生产线中，提高生产效率和灵活性。 4. 结构概览图1.1（GEM Scope）和图1.2（GEM Components）提供了GEM系统的整体架构，包括各个组成部分及其相互关系。 5. 适用文档在1.5部分中，列出了与GEM相关的其他必要文档，这些文档可能包括相关标准、指南或协议，它们是理解和实施GEM标准的基础。 6. 定义第2部分定义了GEM中使用的各种术语和概念，这是理解和遵循标准的关键。 7. 状态模型 - 通信状态模型（3.2章节）：图3.2.1展示了通信状态图，表3.2给出了状态转换表，定义了设备在通信过程中的各种状态和转换条件。 - 控制状态模型（3.3章节）：图3.3描述了控制状态模型，表3.3列举了控制状态的转换规则。 - 设备处理状态（3.4章节）：图3.4和表3.4阐述了设备在执行加工任务时的不同状态及其转换，这对于理解设备的工作流程至关重要。 8. 设备模型除了GEM的核心通信和控制模型外，标准还可能包括对特定设备如检验设备（ISEM）和计量设备的详细规范，确保它们与GEM框架兼容。 9. SEMI SECS/GEM SEMI SECS（ Semiconductor Equipment Communication Standard）/GEM标准组合为半导体制造提供了一套全面的接口标准，用于设备与主机之间的数据交换，使得生产数据的收集、分析和反馈成为可能。 SEMI E30标准是一个关键的工业标准，它为半导体制造设备的自动化和集成提供了基础，促进了制造业的高效运营。通过定义通信、控制和状态模型，SEMI E30确保了不同设备间的互操作性，降低了生产系统的复杂性和成本。

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SEMI E30-1103 © SEMI 1992, 2003 16

3.4 Equipment Processing States — The behavior of

the equipment in the performance of its intended

function must be documented. This processing state

model is highly dependent on the equipment process,

technology, and style. However, there are expected to

be common aspects to these models.

The Processing State Diagram, Figure 3.4, is provided

as an example of an implementation model. This model

demonstrates the expected nature of the processing state

model documentation. There is no requirement that

these specific states be implemented.

The equipment must generate collection events for each

processing state transition, as well as provide status

variables (ProcessState, PreviousProcessState) whose

values are the current processing state and the previous

processing state.

In referring to the Processing State Diagram, note that

the initialization state INIT is not an actual processing

state. It is shown here simply to indicate that the IDLE

processing state is entered upon completion of

equipment system initialization. On the following pages

detailed descriptions are provided for the equipment

processing states and state transitions (numbered) as

shown in the diagram.

3.4.1 Description of Equipment Processing States

IDLE

In this state the equipment is awaiting instructions.

PROCESSING ACTIVE

This state is the parent of all substates where the

context of process program execution exists.

PROCESS

This state is the parent of those substates that refer to

the active preparation and execution of a process

program.

SETUP

In this state all external conditions necessary for

process execution are satisfied, such as ensuring

material is present at the equipment, input/output ports

are in the proper state, parameters such as temperature

and pressure values are within limits, etc. If all setup

operations are already complete, then this becomes a

fall through state and a transition to the next state takes

place.

READY

In this state the equipment is ready for process

execution and is awaiting a START command from the

operator or the host.

EXECUTING

Executing is the state in which the equipment is

executing a process program automatically and can

continue to do so without external intervention.

PAUSE

In this state processing is suspended and the equipment

is awaiting a command.

Each state transition is defined in the following table.

Note that all transitions in this table should be

considered collection events.

Figure 3.4

Processing State Diagram

SEMI E30-1103 © SEMI 1992, 2003 17

Table 3.4 Processing State Transition Table

# Current State Trigger New State Action Comments

1 INIT Equipment initialization

complete.

IDLE None None

2 IDLE Commit has been made to set

up.

SETUP None None

3 SETUP All setup activity has

completed and the equipment

is ready to receive a START

command.

READY This activity is

equipment-

specific.

None

4 READY Equipment has received a

START command from the

host or operator console.

EXECUTING This activity is

equipment-

specific.

None

5 EXECUTING The processing task has been

completed.

IDLE None None

6 PROCESSING

ACTIVE

Equipment has received a

STOP command from host or

operator console.

IDLE None None

7 PROCESSING

ACTIVE

Equipment has received an

ABORT command from host

or operator console.

IDLE This activity is

equipment-

specific.

None

8 PROCESS The equipment decides to

PAUSE due to a condition

such as alarm.

PAUSE This activity is

equipment-

specific.

For this type of

problem, an

operator assist is

usually required.

9 PROCESS Equipment has received a

PAUSE command from host

or operator console.

PAUSE This activity is

equipment-

specific.

None

10 PAUSE Equipment has received a

RESUME command from

host or operator console.

PROCESS

substate

This activity is

equipment-

specific.

None

4 Equipment Capabilities and Scenarios

This section describes the details of the capabilities

required by GEM and provides scenarios for their use.

Capabilities are operations performed by semiconductor

manufacturing equipment. These operations are

initiated through the communications interface using

SECS-II messages. A scenario is a group of SECS-II

messages arranged in a sequence to perform a

capability. Other information may be included with the

scenario for clarity. For each capability, the reader is

provided with a statement of purpose, pertinent

definitions, a detailed description, requirements, and

scenarios.

The following capabilities are discussed:

Establish Communications

Event Notification

Dynamic Event Report Configuration

Variable Data Collection

Trace Data Collection

Limits Monitoring

Status Data Collection

On-line Identification

Alarm Management

Remote Control

Equipment Constants

Process Program Management

Material Movement

Equipment Terminal Services

Error Messages

SEMI E30-1103 © SEMI 1992, 2003 18

Clock

Spooling

Control

4.1 Establish Communications — The Establish

Communications capability provides a means of

formally establishing communications following system

initialization or any loss of communications between

communicating partners, and thus of notifying the

communication partner that a period of non-

communication has occurred.

4.1.1 Purpose — Communications between host and

equipment are formally established through use of the

Establish Communications Request/Establish

Communications Acknowledge transaction.

The use of S1,F1/F2 for this purpose is ambiguous

since the transaction can be used for other purposes and

may occur at any time.

The S1,F13/F14 transaction, used in conjunction with

the Communications State Model, provides a means for

equipment to notify the host, or the host to notify the

equipment, that there has been a period of inability to

communicate. The successful completion of this

transaction also signals a possible need for

synchronization activities between host and equipment.

4.1.2 Definitions

COMMACK — Acknowledge code returned in the

Establish Communications Acknowledge message. See

the SEMI E5 Standard for a full definition of this data

item.

EstablishCommunicationsTimeout — An equipment

constant used to initialize the interval between attempts

to re-send an Establish Communications Request. This

value specifies the number of seconds for the interval.

See the SEMI E5 Standard for a full definition of this

variable data item.

4.1.3 Description — There are potential problems

when one side of the communications link fails and the

other side does not detect it. From the point of view of

the host, a loss of communications has many possible

causes. In some cases, host-controlled settings on the

equipment may need to be reset. In other cases, the

equipment may have continued an automatic processing

sequence during the period of no communication and

may have changed states. The definition of a formal

protocol for establishing communications alerts the host

to the need to synchronize itself with the equipment’s

current status.

Equipment shall consider communications as formally

established whenever either of the following conditions

have been satisfied:

— Communications Request has been sent to the host

and an Establish Communications Acknowledge

has been received within the transaction timeout

period and with an acknowledge code of Accept, or

— Communications Request has been received from

the host, and an Establish Communications

Acknowledge response has been successfully sent

with an acknowledge code of Accept.

When the equipment sends an Establish

Communications Request to the host, this notifies the

host of the possible need to synchronize itself with the

equipment.

When the equipment is attempting to establish

communications, an Establish Communications Request

shall be sent periodically until communications have

been formally established as described above. The

interval between attempts must be user-configurable

and begins as soon as a connection transaction failure is

detected (see Section 3.2).

Attempting to establish communications is not a low-

level connectivity issue, but rather a logical application

issue used by either party to notify its partner that the

host may need to perform synchronization activities

with the equipment.

4.1.4 Requirements

— Equipment must support the Communication State

Model (see Section 3.2).

— Equipment must provide the EstablishCommunica-

tionsTimeout equipment constant described above.

14 Satisfaction of either of these conditions will result in a transition

to the COMMUNICATING substrate. See Section 3.2 for further

detail.

4.1.5.3 Simultaneous Attempts to Establish Communications — For equipment that supports interleaving, it is

possible that either the host or equipment could send an Establish Communications Request before receiving the

request from its partner. As communications are established by the successful acceptance of any one Establish

Communications Request, it is immaterial who sends the request first. The roles of host and equipment may be

reversed.

Equipment Receives S1,F14 From Host Before Sending S1,F14:

Equipment Sends S1,F14 To Host Before Receiving S1,F14:

15 Communications are establisted at the successful completion of the S1,F13/14 transaction where COMMACK is set to zero.

16 Communications are established on the successful transmission of S1,F14, even if there is an open S1,F13.

4.2 Data Collection — Data collection allows the host

to monitor equipment activity via event reporting, trace

data reporting, limits monitoring, and query of selected

status or other variable data.

4.2.1 Event Data Collection — Event data collection

provides a dynamic and flexible method for the user to

tailor the equipment to meet individual needs with

respect to data representation and presentation to the

host. The event-based approach to data collection

provides automatic notification to the host of

equipment activities and is useful in monitoring the

equipment and in maintaining synchronization with the

equipment.

Event data collection may be broken into two logical

parts: host notification when an event occurs and

dynamic configuration of the data attached to the event

notification.

4.2.1.1 Event Notification — This section describes the

method of notifying the host when equipment

collection events occur.

4.2.1.1.1 Purpose — This capability provides data to

the host at specified points in equipment operation.

This asynchronous reporting eliminates the need for the

host to poll the equipment for this information. Events

on the equipment may trigger activity on the part of the

host. Also, knowledge of the occurrence of events

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