2013无线移动应用 MEMS 手册：RF MEMS与多元化应用探索

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《微机电系统在无线与移动应用手册》(2013)由Woodhead Publishing Limited出版，该书分为两部分，旨在提供对微电子机械系统(MEMS)在无线通信和移动设备中的最新进展和应用的全面了解。第一部分，共十章，聚焦射频微机电系统(RF MEMS)作为关键技术。这部分深入探讨了射频组件，如射频天线和前端模块的制造工艺、技术前沿，以及芯片级封装和可靠性问题。此外，书中还包含了一章关于无线技术和协议的概述，帮助读者理解当今无线节点和网络中数据传输的相关协议和挑战，从而获得系统的整体认识。第二部分，涵盖八章内容，侧重于各种便携式、无线和移动系统中的MEMS应用。这部分内容涉及能量采集技术，以支持无线系统的供电；植入式生物医疗微型系统，特别关注眼用和药物输送的应用，从历史到现代，结合了无线技术和MEMS的发展。另外，书中还讨论了汽车雷达、电信系统以及便携式显示系统中MEMS的应用。作者们相信，这本书不仅提供了基础理论，也包含了实际应用的案例，对于扩展这一领域的知识具有重要意义。感谢所有忙碌的作者们为本书做出的贡献，并对Woodhead Publishing的工作人员的专业精神和投入表示赞赏，他们成功完成了这个项目。此外，读者可以从Woodhead Publishing的官方网站www.woodheadpublishing.com获取更多书籍信息，包括《微机电系统在汽车和航空航天应用》、《智能传感器与MEMS》和《半导体气体传感器》等其他相关著作。电子版内容可通过www.woodheadpublishingonline.com获取，建议图书馆推荐给机构内的用户，让大家都能受益于网站丰富的资源。《微机电系统在无线与移动应用手册》是一本综合性的参考书，涵盖了从基础原理到实际应用的广泛内容，是了解和研究MEMS在现代无线和移动技术中作用的重要资源。

Contributor contact details xv

Chapter 12

Dr W. Ko* and P. X.-L. Feng

Department of Electrical

Engineering and Computer

Science

Case School of Engineering

Case Western Reserve University

10900 Euclid Avenue

Cleveland

Ohio 44106, USA

E-mail: whk@cwru.edu; philip.

feng@case.edu

Chapter 13

Dr Wen Li

Michigan State University

428 S. Shaw Lane

2120 Engineering Building

East Lansing

MI 48824, USA

E-mail: wenli@egr.msu.edu

Chapter 14

Dr Robert Blue and Professor

Deepak Uttamchandani*

Centre for Microsystems and

Photonics

Department of Electronic and

Electrical Engineering

University of Strathclyde

204 George St

Glasgow G432YL, UK

E-mail: robert.blue@eee.strath.

ac.uk; d.uttamchandani@strath.

ac.uk

Chapter 15

R. Sheybani

Department of Biomedical

Engineering 1042 Downey Way

University of Southern California

DRB-140 Los Angeles

CA 90089–1111 USA

E-mail: rsheyban@usc.edu

S. M. Schober

Ming Hsieh Department of

Electrical Engineering

University of Southern California

3740 McClintock Avenue

EEB 100 Los Angeles

CA 90089–2560 USA

E-mail: schober@usc.edu

Dr Ellis Meng*

Department of Biomedical

Engineering

1042 Downey Way

University of Southern California

DRB-140 Los Angeles

CA 90089–1111 USA

E-mail: ellis.meng@usc.edu

and

Ming Hsieh Department of

Electrical Engineering

University of Southern California

3740 McClintock Avenue

EEB 100 Los Angeles

CA 90089–2560 USA

xviii Woodhead Publishing Series in Electronic and Optical Materials

1 2 Handbook of advanced dielectric, piezoelectric and ferroelectric materi-

als: Synthesis, properties and applications

Edited by Z.-G. Ye

1 3 Materials for fuel cells

Edited by M. Gasik

1 4 Solid-state hydrogen storage: Materials and chemistry

Edited by G. Walker

1 5 Laser cooling of solids

S. V. Petrushkin and V. V. Samartsev

1 6 Polymer electrolytes: Fundamentals and applications

Edited by C. A. C. Sequeira and D. A. F. Santos

1 7 Advanced piezoelectric materials: Science and technology

Edited by K. Uchino

1 8 Optical switches: Materials and design

Edited by S. J. Chua and B. Li

1 9 Advanced adhesives in electronics: Materials, properties and

applications

Edited by M. O. Alam and C. Bailey

2 0 Thin  lm growth: Physics, materials science and applications

Edited by Z. Cao

2 1 Electromigration in thin  lms and electronic devices: Materials and

reliability

Edited by C.-U. Kim

2 2 In situ characterization of thin  lm growth

Edited by G. Koster and G. Rijnders

2 3 Silicon-germanium (SiGe) nanostructures: Production, properties and

applications in electronics

Edited by Y. Shiraki and N. Usami

2 4 High-temperature superconductors

Edited by X. G. Qiu

2 5 Introduction to the physics of nanoelectronics

S. G. Tan and M. B. A. Jalil

2 6 Printed  lms: Materials science and applications in sensors, electronics

and photonics

Edited by M. Prudenziati and J. Hormadaly

2 7 Laser growth and processing of photonic devices

Edited by N. A. Vainos

2 8 Quantum optics with semiconductor nanostructures

Edited by F. Jahnke

2 9 Ultrasonic transducers: Materials and design for sensors, actuators and

medical applications

Edited by K. Nakamura

Woodhead Publishing Series in Electronic and Optical Materials xix

3 0 Waste electrical and electronic equipment (WEEE) handbook

Edited by V. Goodship and A. Stevels

3 1 Applications of ATILA FEM software to smart materials: Case studies

in designing devices

Edited by K. Uchino and J.-C. Debus

3 2 MEMS for automotive and aerospace applications

Edited by M. Kraft and N. M. White

3 3 Semiconductor lasers: Fundamentals and applications

Edited by A. Baranov and E. Tournie

3 4 Handbook of terahertz technology for imaging, sensing and

communications

Edited by D. Saeedkia

3 5 Handbook of solid-state lasers: Materials, systems and applications

Edited by B. Denker and E. Shklovsky

3 6 Organic light-emitting diodes: Materials, devices and applications

Edited by A. Buckley

3 7 Lasers for medical applications: Diagnostics, therapy and surgery

Edited by H. Jelínková

3 8 Semiconductor gas sensors

Edited by R. Jaaniso and O. K. Tan

3 9 Handbook of organic materials for optical and (opto)electronic devices:

Properties and applications

Edited by O. Ostroverkhova

4 0 Metallic  lms for electronic, optical and magnetic applications: Structure,

processing and properties

Edited by K. Barmak and K. Coffey

4 1 Handbook of laser welding technologies

Edited by S. Katayama

4 2 Nanolithography: The art of fabricating nanoelectronic and nanophoto-

nic devices and systems

Edited by M. Feldman

4 3 Laser spectroscopy for sensing: Fundamentals, techniques and

applications

Edited by M. Baudelet

4 4 Chalcogenide glasses: Preparation, properties and applications

Edited by J.-L. Adam and X. Zhang

4 5 Handbook of MEMS for wireless and mobile applications

Edited by D. Uttamchandani

4 6 Subsea optics and imaging

Edited by J. Watson and O. Zielinski

4 7 Carbon nanotubes and graphene for photonic applications

Edited by S. Yamashita, Y. Saito and J. H. Choi

剩余635页未读，继续阅读

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