Ultravac-Phi MultiPak 9 User Manual: IBM兼容PC上的ESCA/XPS数据分析软件

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MultiPak™是由ULVAC-PHI公司开发的一款专门针对PHI系统或软件所采集的螺旋钻（Spiral Drill）和能量色散X射线光电子能谱（ESCA/XPS）数据进行深入分析与复杂图像处理的软件。该软件主要适用于IBM兼容计算机，包括运行在PHI系统兼容PC机上的版本，以及作为独立包在IBM兼容PC机上进行离线数据分析。 MultiPak Version 9是其第九版，具有版权@2011年，强调了ULVAC-PHI公司的知识产权保护。这款软件包含了多个与ULVAC-PHI业务相关的商标，如PHI、Quantera SXM、Quantum 2000 Scanning ESCA Microprobe、700 Scanning Auger Nanoprobe等，这些都是该公司在扫描电子显微镜（SEM）、原子力显微镜（AFM）和X射线光电子能谱分析等领域的产品标识。 MultiPak软件的操作手册详细介绍了用户操作步骤和功能，覆盖了如何安全地操作这款软件，以及它如何确保符合全球公认的安全标准。所有ULVAC-PHI产品均设计和制造遵循严格的电气和机械安全规范，旨在为操作员和周边环境提供保护。值得注意的是，MultiPak利用了其他知名品牌的专有技术，例如IBM PC的注册商标、MATLAB的商标（由The MathWorks Inc.拥有）、Windows系列（微软的注册商标）以及Pentium（英特尔的注册商标）等，这表明该软件可能集成了这些平台的计算能力来优化数据处理性能。此外，它还可能支持UNIX操作系统，这是AT&T Bell Laboratories的商标，这表明其跨平台兼容性和高级功能。 MultiPak™不仅是ULVAC-PHI为用户提供的一种强大的数据分析工具，也是与多种技术整合的产物，它将复杂的ESCA/XPS数据处理简化，使用户能够高效地解析和理解实验结果，尤其是在材料科学、物理学和化学领域中的应用。

List of Figures

xvi

FIGURE 3-4. EXAMPLE OF AN AXIS PROPERTIES DIALOG BOX BEFORE REVISION. ...........17

FIGURE 3-5. PROFILE WINDOW FOR ORIGINAL AXIS PROPERTIES DIALOG BOX IN FIGURE

3-4. 17

FIGURE 3-6. EXAMPLE OF AN AXIS PROPERTIES DIALOG BOX AFTER REVISION...............18

FIGURE 3-7. PROFILE WINDOW FOR REVISED AXIS PROPERTIES DIALOG BOX IN FIGURE

3-6. 18

FIGURE 3-8. DISPLAY OF DATA PARAMETERS IN A NOTEPAD WINDOW.............................41

FIGURE 3-9. EXAMPLE OF AN ENERGY CURSOR AT 1610.04 EV. ......................................45

FIGURE 3-10. EXAMPLE OF EXPORT TO ASCII FILE OF SPECTRUM FILE. .........................47

FIGURE 3-12. EXAMPLE OF EXPORT TO ASCII FILE OF MAP DATA. ..................................49

FIGURE 3-13. EXAMPLE OF EXPORT TO ASCII FILE OF PROFILE......................................49

FIGURE 3-14. RESULT OF DEFINING A LINE WITH THE EXTRACT LINES FUNCTION IN THE

MAP WINDOW (TONER.MAP)....................................................................................51

FIGURE 3-15. PROFILE WINDOW AFTER PRESSING LINE/NEW. (A BINOM3 SMOOTH WAS

APPLIED TO THE LINE

.) ................................................................................................52

FIGURE 3-16 FWHM/AREA… FUNCTION PERFORMED ON A CARBON PEAK IN AN XPS

SPECTRUM FILE. .........................................................................................................58

FIGURE 3-17 IMAGEENHANCE…........................................................................................61

FIGURE 3-18. DISPLAY OF CALCULATED COEFFICIENTS A AND B. ....................................64

FIGURE 3-19. SPECTRUM WINDOW BEFORE OPENING THE MONTAGE VIEWER...................74

FIGURE 3-20 SPECTRUM WINDOW AFTER OPENING THE MONTAGE VIEWER AND

SELECTING THE

MONTAGE DISPLAY MODE. ................................................................74

FIGURE 3-21 PCA IMAGE… ...............................................................................................80

FIGURE 3-22 POLYNOMIAL BACKGROUND WINDOW .........................................................84

FIGURE 3-23. SELECTION SLIDER IN THREE STATES IN THE SPECTRUM (LEFT) AND

PROFILE (RIGHT) WINDOWS: SHOWALL (TOP), SHOW SOME (MIDDLE), AND SHOWONE

(BOTTOM). 95

FIGURE 3-24. OPTIONS USING THE SELECTION SLIDER...................................................96

FIGURE 3-25. SPECTRUM BEFORE 9-POINT SAVITZKY-GOLAY SMOOTH AND DIFFERENTIATE

USING THE SMOOTH/DERIVATIVE FUNCTION............................................................101

FIGURE 3-26. SPECTRUM AFTER 9-POINT SAVITZKY-GOLAY SMOOTH AND DIFFERENTIATE

USING THE SMOOTH/DERIVATIVE FUNCTION............................................................101

FIGURE 3-27. XPS SPECTRUM IN SPECTRAL DECONVOLUTION APPLICATION. .................103

FIGURE 3-28. PC COMPASS / PHI QUANTERA SETTING EXAMPLE....................................105

FIGURE 3-29. PC COMPASS / QUANTUM 2000 SETTING EXAMPLE....................................105

FIGURE 3-30. SMARTSOFT-XPS / PHI QUANTERA SETTING EXAMPLE.............................106

FIGURE 3-31. SMARTSOFT-XPS / QUANTUM 2000 SETTING EXAMPLE.............................106

FIGURE 3-32.PHI-SUMMITT / VERSAPROBE SETTING EXAMPLE...................................106

FIGURE 3-33. THE AUXILIARY UI AND CONTROLS FOR SPECTRAL DECONVOLUTION........107

FIGURE 3-34. ........... FIXED (TOP), AUTO–OVERLAP (MIDDLE), AND AUTO–NOOVER STACK

MODES. 112

List of Tables

TABLE 1-1. MOUSE FUNCTIONS COMMON TO THE SPECTRUM, PROFILE, AND MAP

WINDOWS........................................................................................................................7

TABLE 1-2. MOUSE FUNCTIONS IN THE SPECTRUM WINDOW. .............................................9

TABLE 1-3. MOUSE FUNCTIONS IN THE PROFILE WINDOW. ...............................................11

TABLE 1-4. MOUSE FUNCTIONS IN THE MAP WINDOW.......................................................13

TABLE 1-5. MOUSE FUNCTIONS IN THE PERIODIC TABLE WINDOW...................................14

TABLE 1-6. SOFTWARE PERFORMANCE REPORT FILE. ....................................................16

TABLE 1-7. FIELDS OF THE SOFTWARE PERFORMANCE REPORT.....................................16

TABLE 1-8. DATA FILE TRANSLATION FUNCTIONS..........................................................17

TABLE 3-1. MOUSE FUNCTIONS DURING THE ANNOTATE… FUNCTION. ...........................8

TABLE 3-2. MOUSE FUNCTIONS DURING THE COLOR BAR FUNCTION. ...............................23

TABLE 3-3. MOUSE FUNCTIONS IN CURVE FIT................................................................26

TABLE 3-4. LOWER TOOLBAR FUNCTION DURING CURVE FIT.............................................30

TABLE 3-5. MOUSE FUNCTIONS WITH ENERGY CURSOR.................................................44

TABLE 3-6. MOUSE FUNCTIONS FOR THE EXTRACT LINES FUNCTION. ..............................50

TABLE 3-7. MOUSE FUNCTIONS FOR EXTRACT SPECTRA IN THE MAP WINDOW................53

TABLE 3-8. MOUSE FUNCTIONS FOR THE EXTRACT SPECTRA FUNCTION IN THE PROFILE

WINDOW......................................................................................................................54

TABLE 3-9. MOUSE FUNCTIONS IN THE PROFILE WINDOW FOR LLS FIT...........................69

TABLE 3-10. MOUSE FUNCTIONS IN THE MAP WINDOW FOR LLS FIT. .............................71

TABLE 3-11. MOUSE FUNCTIONS IN THE OPEN DIALOG BOX............................................76

TABLE 3-12. MOUSE FUNCTIONS FOR REGIONS AND REGION BOUNDARIES. ....................88

TABLE 3-13. MOUSE FUNCTIONS FOR THE SCATTER DIAGRAM… FUNCTION IN SOURCE

MAP MODE. .................................................................................................................92

TABLE 3-14. MOUSE FUNCTIONS FOR THE SCATTER DIAGRAM… FUNCTION IN PHASE

MAP MODE. .................................................................................................................92

TABLE 3-15. MOUSE FUNCTIONS DURING SHIFT SETUP…................................................98

TABLE 3-16. LOWER TOOLBAR FUNCTIONS IN THE PROFILE WINDOW DURING TARGET

FACTOR ANALYSIS.....................................................................................................122

TABLE 3-17. LOWER TOOLBAR FUNCTIONS IN THE SPECTRUM WINDOW DURING TARGET

FACTOR ANALYSIS.....................................................................................................123

TABLE 3-18. DATA COLLECTION CONDITIONS RECOMMENDED FOR SION SAMPLE..........140

xvi

Limited Warranty

Except as otherwise provided herein, the Seller

warrants to Buyer that the equipment sold

hereunder, whether it is new equipment or

remanufactured (reconditioned) equipment, is,

at the time of shipment to Buyer from Seller,

free from defects in material and workmanship.

As Buyer’s sole exclusive remedy under this

warranty Seller agrees either to repair or

replace, at Seller’s sole option and free of part

charge to Buyer, any part or parts of such

equipment which, under proper and normal

conditions of use prove to be defective within

12 months from the date of receipt by the

Buyer. Warranty period for equipment

requiring installation by Seller will commence

on completion of standard installation services.

If customer delays installation beyond 45 days

after delivery, the warranty period will

commence to run 45 days after delivery. After

installation, any realignment, readjustment,

recleaning or recalibration, provided it does not

relate to a proven defect in material or

workmanship, shall be performed only at

Seller’s then current rates for service.

Exclusions and Limitations

It is recognized that some parts by their nature

(expendable items) may not function for one

full year; therefore, excluded from the

foregoing warranty are filaments, anodes,

cathodes, multipliers, retard grids, special

ceramics, ionizers, along with other such parts

mentioned in the applicable operating manual.

The foregoing warranty excludes certain major

items or accessories specifically indicated on

applicable price lists or quotations, as to which

Seller passes to Buyer whatever warranty is

provided to Seller by the manufacturer or the

specific warranty indicated by the price list or

quotation.

This warranty does not cover loss, damage, or

defects resulting from transportation to the

Buyer’s facility, improper or inadequate

maintenance by Buyer, buyer-supplied

software or interfacing, unauthorized

modification or misuse, operation outside of

the environmental specifications for the

equipment or improper site preparation and

maintenance.

Product Service

All claims must be brought to the attention of

Seller within 30 days of the failure to perform.

Seller at his option may require the product to

be returned to the factory, transportation

prepaid, for repair.

Refund of Purchase Price

In lieu of the foregoing, Seller may at any time

elect, in its sole discretion, to discharge its

warranty by accepting the return of such

equipment and refunding any portion of the

purchase price paid by Buyer.

Software and Firmware Products

The sole exclusive warranty applicable to

software and firmware products provided by

Seller for use with a processor will be as

follows: Seller warrants that such software and

firmware will conform to Seller’s program

manuals current at the time of shipment to

Buyer when properly installed on that

processor. Seller does not warrant that the

operation of the processor software or firmware

will be uninterrupted or error free.

No other warranty is expressed or implied. Seller expressly disclaims the implied

warranties of merchantability and fitness for a particular purpose.

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