收稿日期: 2018-12-20; 修回日期: 2019-01-17; 录用日期: 2019-03-01
基金项目: 国家自然科学基金(U1730132,61705092)、江苏省自然科学基金(BK20170194,BK20180598)
*
E-mail: cheng.liu@hotmail.co.uk
基于叠层扫描成像技术的成像透镜透射波前测量方法
纵榜铭,栾嘉蕴,蒋志龙,孔艳,王绶玙,刘诚
*
江南大学理学院, 江苏 无锡 214122
摘要 将叠层扫描成像技术(ePIE)用于成像透镜透射波前的高精度测量。将透镜的透射光束照射至一个固定于二维扫描台的衍射
物上,并在其后的探测器上形成衍射光斑,扫描台横向扫描并记录衍射物在每个位置所形成的衍射光斑,采用 ePIE 精确重建衍射物体
的光场复振幅,并据此反演出透镜后表面的透射光波前;移去透镜后重复上述步骤,可以重建入射到透镜上的光束波前;将透射波前减
去入射波前即可得到透镜的透射波前。该方法具有准确性高、结构简单、成本低廉等优点。
关键词 测量; 透镜透射波前; 叠层扫描成像技术; 衍射成像; 波前重建
中图分类号 O436 文献标识码 A doi: 10.3788/CJL201946.0804001
Method to Measure Transmitting Wave-Front of Imaging Lens Based on
Extended Ptychographical Iterative Engine
Zong Bangming, Luan Jiayun, Jiang Zhilong, Kong Yan, Wang Shouyu, Liu Cheng
*
School
of
Science
,
Jiangnan
University
,
Wuxi
,
Jiangsu
214122,
China
Abstract An extended ptychographical iterative engine (ePIE)-based method is proposed to accurately measure the
transmitting wave-front of an imaging lens. The laser beam exiting the imaging lens is illuminated on a diffraction object fixed on
a two-dimensional scanning stage, and the diffraction pattern is formed on the subsequent detector. The scanning stage
transversely scans and records the diffraction pattern formed by the diffraction object at each position. The complex amplitude
of the laser field incident on the diffraction object is faithfully reconstructed from the recorded diffraction pattern using the
proposed ePIE algorithm, and the wave-front of the transmitted laser on the rear surface of the lens is retrieved using the
Fresnel equations. Additionally, the wave-front illuminated on the lens can be reconstructed by repeating the above mentioned
procedures after the lens is removed. Then, the transmitting wave-front of the lens is obtained by subtracting the illuminated
wave-front from the exiting wave-front. The proposed method has several advantages including high accuracy, simple structure,
and low cost.
Key words measurement; transmitting wave-front of lens; extended ptychographical iterative engine; diffraction imaging;
wave-front reconstruction
OCIS codes 050.1940; 100.5070; 120.5050
1 引言
光束穿过成像透镜前后所发生的波前变化由透镜的实际参数严格决定,测量光束所发生的波前变化可以
得到透镜的具体成像性质,因此透镜的透射波前测量在传统透镜加工和质量检验等领域都有广泛的应用
[1-
4]
。同时,随着计算光学成像技术的发展,在精确获知透镜透射波前的基础上,可以基于质量不理想透镜所形成
的低分辨率图像重建出高分辨图像,因此透镜波前的测量显得愈发重要。干涉测量、Shack-Hartmann 传感