iv
Library of Congress Cataloging-in-Publication Data
Van Zant, Peter.
Microchip fabrication / Peter Van Zant.—5th ed.
p. cm.
Includes index.
ISBN 0-07-143241-8
1. Semiconductors—Design and construction. 2. Integrated circuits—Design
and construction. I. Title.
TK7871.85.V36 2004
621.3815'2—dc22 2004040287
Copyright © 2004, 2000, 1997, 1984 by The McGraw-Hill Companies, Inc. All
rights reserved. Printed in the United States of America. Except as permitted under
the United States Copyright Act of 1976, no part of this publication may be repro-
duced or distributed in any form or by any means, or stored in a data base or re-
trieval system, without the prior written permission of the publisher.
1234567890DOC/DOC010987654
ISBN 0-07-143241-8
The sponsoring editor for this book was Stephen S. Chapman and the
production supervisor was Pamela Pelton. It was set in Century Schoolbook
by J. K. Eckert & Company, Inc.
Printed and bound by R. R. Donnelley.
McGraw-Hill books are available at special quantity discounts to use as premiums
and sales promotions, or for use in corporate training programs. For more informa-
tion, please write to the Director of Special Sales, McGraw-Hill Professional, Two
Penn Plaza, New York, NY 10121-2298. Or contact your local bookstore.
This book is printed on recycles, acid-free paper containing a minimum of 50% re-
cycled, de-inked fiber.
Information contained in this work has been obtained by The McGraw-Hill
Companies, Inc. (“McGraw-Hill”) from sources believed to be reliable.
However, neither McGraw-Hill nor its authors guarantee the accuracy or
completeness of any information published herein and neither McGraw-
Hill nor its authors shall be responsible for any errors, omissions, or dam-
ages arising out of use of this information. This work is published with the
understanding that McGraw-Hill and its authors are supplying information
but are not attempting to render engineering or other professional services.
If such services are required, the assistance of an appropriate professional
should be sought.
VanZant.book Page iv Monday, April 26, 2004 1:26 PM
评论6