![](https://csdnimg.cn/release/download_crawler_static/7042039/bg5.jpg)
The principle of white vertical scanning interferometry
2 Test system
White vertical scanning interferometry: The vertical scanning white light
interferometer movement consists of two processes : the process of
focusing and the process of vertical scanning process.
First, do the manually global search. Let CCD get the images time by time,
based on white light interference fringe pattern to determine the initial
and the end position; then, based on the initial interference fringes and
the end interference fringes position to determine the vertical scanning
range, the spectrum of every sources are to participate in interference,
and the intensity of interference of every lightwave are distributed and
then make the superposition. on In the measured surface , any two measured
points at different heights ,its location fringe interference peak
envelope will be different. The difference between the measured length
of the arm correspond to the height difference in two measuring points
between the two peak envelopes. The one-dimensional shift stage drives
the microscopic interferometer in the vertical scanning direction,
recording of the measured object corresponding to the white pixels in each
scan interferogram,recording for every pixel to make the image we need.
Principles of Optics:
【1】
【2】