第 卷 第 期
年 月
武 汉 理 工 大 学 学 报
JOURNAL OF WUHAN UNIVERSITY OF TECHNOLOGY
Vol No
Jun
DOI
j
issn
厚 度 对 CMN CT 薄 膜 结 构 与 性 能 的 影 响 研 究
赵雷康 朱 杰 雷 琼 周 静
武汉理工大学材料科学与工程学院 武汉
摘 要 采用 Pechini 方法制备 CaM g
Nb
O
CM N 及 CaTiO
CT 前驱体溶液 采用液相旋涂技术按照一定的排
布方式制备 CM N CT 介电异质薄膜 研究薄膜厚度 异质层排布方式及热处理时间等对薄膜的结构与介电性能的影响
结果表明 CMN CT 介电异质薄膜具有单一的钙钛矿结构 异质界面具有介电增强效应 随着薄膜厚度增加 异质结构
变得不明显 晶粒尺寸和表面粗糙度增加 介电性能增强 厚度到一定程度以后 介电损耗会明显增加 排列方式对异质
薄膜的介电性能产生大的影响 CT 薄膜层越靠近底层的异质薄膜的表面粗糙度越大 界面数越多的排布方式的介电增
强效应越明显
关键词 异质薄膜 Pechini 方法 薄膜结构 介电性能
中图分类号 TB 文献标识码 A 文章编号
Effect of Thickness on the Structure and Dielectric Properties
of CMNCT Thin Films
ZHA O Lei
kang ZHU Jie L EI Qiong ZHOU Jing
School of Materials Science and Engineering Wuhan University of Technology Wuhan China
Abstract
Precursor solutions for CaMg
Nb
O
CMN and CaTiO
CT synthesis were obtained by Pechini method
CMN CT dielectric heterogeneous thin films were prepared by spincoating with CM N and CT precursor solutions in different
stacking sequence Effects of thickness stacking sequence and thermal treatment on the structure and dielectric properties of
CMN CT thin films were investigated The results indicated that pure perovskite phase was obtained in the CM N CT dielectric
heterogeneous thin films And the dielectric enhancement phenomenon was presented which due to the heterogeneous inter
faces between CM N layer and CT layer As the film thickness increased the interface between heterogenerous layers became
less distinct and the grain size surface roughness and dielectric loss all increased and dielectric properties enhanced T he ar
rangement pattern had important effect on dielectric properties of heterogeneous thin films The heterogeneous thin film w ith
CT layer locating at bottom near the substrate had larger surface roughness than those with CMN layer locating at bottom And
the more heterogeneous interfaces existing in the heterogeneous thin films the stronger effect of dielectric enhancement it will
have
Key words
heterogeneous thin films Pechini method film structure dielectric properties
收稿日期
基金项目 教育部科学技术研究重点项目
作者简介 赵雷康 男 讲师 Email zlk w hut edu cn
微波介电器件具有输出功率大 适合于微波高频范围应用等优点 已成为下一代微波器件的主要发展方
向之一
根据微波理论 介电薄膜材料应具有比相应块状材料更低的微波损耗特性和更好的耦合特性才