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1 SEMI E87-0312 © SEMI 1999, 2012
SEMI E87-0312
SPECIFICATION FOR CARRIER MANAGEMENT (CMS)
This Standard was technically approved by the global Information & Control Technical Committee. This
edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011.
Available at www.semiviews.org and www.semi.org in March 2012; originally published in 1999; previously
published July 2009.
1 Purpose
1.1 This Document provides a standardized behavior for host view communication with production equipment
during the coordination, execution, and completion of automated and manual carrier transfers to and from the
equipment and, if it exists, its internal buffer space.
2 Scope
2.1 This is a Standard that covers host and equipment communication for SEMI E15.1 300 mm load ports.
2.2 The scope of this Document is to define standards that facilitate the host’s knowledge and role in automated and
manual carrier transfers, as well as internal buffer equipment carrier transfers. Specifically, this Document provides
state models and scenarios that define the host interaction with the equipment for the following:
• Carrier transfer between AMHS vehicles and production equipment load ports.
• Carrier transfers to/from production equipment internal buffer space.
• Equipment and load port access mode switching.
• Carrier to load port association.
• CarrierID verification and Carrier slot map verification.
NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their
use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and
determine the applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This Standard applies to semiconductor equipment with SEMI E15.1 compliant load ports. It may also be
applied to other manufacturing equipment that supports automated carrier transfers, and/or contains an internal
buffer. This Standard is intended to be used for production equipment. It may or may not be applied to other types of
equipment. Also, stocker load ports are not addressed by this Standard.
4 Referenced Standards and Documents
4.1 SEMI Standards and Safety Guidelines
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface
SEMI E90 — Specification for Substrate Tracking
SEMI E99 — The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
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SEMI E87-0312 © SEMI 1999, 2012 2
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 AGT — automated guided transport
5.1.2 AGV — automated guided vehicle
5.1.3 AMHS — automated material handling system
5.1.4 FIMS — front-opening interface mechanical standard
5.1.5 FOUP — front opening unified pod
5.1.6 GEM — generic equipment model
5.1.7 OHT — overhead hoist transport
5.1.8 PGV — person guided vehicle
5.1.9 PIO — parallel input/output interface
5.1.10 RGT — rail guided transport
5.1.11 RGV — rail guided vehicle
5.2 Definitions
5.2.1 automated material handling system (AMHS) — an automated system to store and transport materials within
the factory.
5.2.2 automation — the degree to which activities of machines or production systems are self-acting. In this
standard automation provides methods that will reduce the amount of operator intervention required.
5.2.3 buffer — a set of one or more locations for holding carriers at/inside the production equipment.
5.2.4 carrier — a container, such as a FOUP or open cassette, with one or more positions for holding substrates.
5.2.5 CarrierID — a readable and unique identifier for the carrier.
5.2.6 CarrierID read — the process of the equipment reading the CarrierID from the carrier.
5.2.7 carrier ID tag (tag, ID tag) — a physical device for storing Carrier ID and other information. There are two
basic types of tags, read-only tags and read/write tags. [SEMI E99]
5.2.8 collection event — a collection event is an event (or grouping of related events) on the equipment that is
considered to be significant to the host.
5.2.9 docked position — the position where the carrier is ready for substrate extraction or insertion.
5.2.10 front-opening interface mechanical standard (FIMS) port — the substrate access port where the FOUP is
opened and closed.
5.2.11 fixed buffer equipment — production equipment that has only fixed load ports and no internal buffer for
carrier storage. Substrates are loaded and unloaded directly from the carrier at the load port for processing.
5.2.12 host — the factory computer system or an intermediate system that represents the factory and the user to the
equipment.
5.2.13 internal buffer — a set of locations within the equipment to store carriers. These locations exclude load ports.
5.2.14 internal buffer equipment — equipment that uses an internal buffer.
5.2.15 load — the operation of placing a carrier on a load port.
5.2.16 load port — the interface location on the equipment where carriers are loaded and unloaded.
5.2.17 object instantiation — the act of storing of information related to a physical or logical entity so that it can be
recalled on demand based on its public identifier.
5.2.18 on-line equipment — equipment that is connected to, and able to communicate fully with, the host.
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3 SEMI E87-0312 © SEMI 1999, 2012
5.2.19 process equipment — equipment used to produce product, such as semiconductor devices. This excludes
metrology and material handling equipment.
5.2.20 production equipment — equipment used to produce product, such as semiconductor devices, including
substrate sorting, process, and metrology equipment and excluding material handling equipment.
5.2.21 properties — a set of name value pairs assigned to an object or used in a service message to include
additional information about the object (i.e., carrier, port, etc.).
5.2.22 re-initialization — a process where production equipment is either powered off then on or when some kind
of hardware or software reset is initiated to cause the equipment to reset and possibly reload its software. On
production equipment that contains some kind of mass storage device this can also be called a ‘reboot.’
5.2.23 read position — any position on a load port or in an internal buffer from which the tag on a carrier can be
read.
NOTE 1: This position may vary on any particular equipment depending on the read technology selected by the end user. Some
technology/load ports may allow the carrier to be moved during reading. Equipment may have more than one read position.
5.2.24 single communication connection — exactly one physical connection using exactly one logical session and a
standard set of messages.
5.2.25 slot map –– the information that relates which slots in a carrier hold substrates, both correctly and incorrectly.
5.2.26 slot map read –– the process of the equipment reading the slot map for substrate position and placement
within the carrier.
5.2.27 standard message set — messages conforming to standard message specifications.
5.2.28 substrate — material held within a carrier. This can be product, or durables such as reticles.
5.2.29 substrate port — the carrier location from which substrates are accessed by the equipment.
5.2.30 transfer unit — maximum number of carriers allowed in a specific transfer service:
• AA is the maximum number of carriers allowed for acquisition at the transfer source.
• BB is the maximum number of carriers allowed for deposit at the transfer destination.
• CC is the maximum number of carriers allowed for transfer in one transport vehicle.
The transfer unit is the minimum of AA, BB, and CC.
5.2.31 undocked — the status of a carrier on a load port or in an internal buffer that is not at the docked position.
5.2.32 unload — the operation of removing a carrier from a load port.
5.2.33 write position — any position on a load port or in an internal buffer from which the tag on a carrier can be
written to. This position may vary on any particular equipment depending on the write technology selected by the
end user. Some technology/load ports may allow the carrier to be moved during writing. The read position and the
write position may or may not be the same position.
6 Requirements
6.1 Carrier Management Standard (CMS) compliant equipment is required to provide certain capabilities defined by
other standards: accessibility to status information, event reporting, alarm management, and equipment control.
These requirements shall be satisfied through compliance to the following sets of Standards:
6.2 Generic Equipment Model Standard (GEM) SEMI E30
• Event Notification
• Status Data Collection
• Equipment Constants
• Alarm Management
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SEMI E87-0312 © SEMI 1999, 2012 4
• Equipment Control
6.3 Object-Based Standards
• Object Services Standard [SEMI E39]
7 Conventions
7.1 Objects
7.1.1 Whenever the equipment is required to know about specific kinds of entities, and required to manage
information concerning these entities, it is useful to treat these entities as objects that comply with the basic
requirements of SEMI E39 Object Services Standard (OSS). This is especially true whenever there are a large
number of objects of a given type or when the entities are transient rather than permanent. In both cases, it is
difficult to describe a general way for the host and equipment to specify which particular entity is referenced and to
get information related only to a specific one out of many.
7.1.2 By defining these entities as objects that comply with OSS, it is only necessary for the host to specify the type
of object and its specific identifier in order to inquire about one or more properties of the specific entity of interest.
7.1.3 Object Properties
7.1.3.1 A property (attribute) is information about an individual object that is presented as a name/value pair. The
name is a formally reserved text string that represents the property, and the value is the current setting for that
property.
7.1.3.2 Properties shall be accessible to the host via the service GetAttr for the Carrier object. Using SEMI E39
Object Services Standard, for example, it is possible to:
• get the list of IDs for the current carriers at the equipment, and
• get the specified properties for one or more individual carriers.
7.1.4 Rules for Object Properties
• Attributes with RO access can not be changed using SetAttr service as defined in OSS.
• Attributes with RW access can be changed using SetAttr service as defined in OSS.
• Additional attributes may be specified by the user or the equipment supplier by using an attribute name starting
with “UD” (User Defined). Care should be taken to ensure the name of the attribute is unique.
7.1.5 Object Attribute Table
7.1.5.1 The object attribute table is used to list all the attributes related to the defined object as shown below the
access is defined as Read only (RO) or Read/Write (RW). The REQD column is used to specify whether the
attribute is required for implementation. Finally, the Form column is used to specify the format of that particular
attribute.
Table 1 Object Attribute Table
Attribute Name Definition Access Reqd Form
ObjType Object type RO Y Text = ‘Carrier’
7.2 State Model Methodology
7.2.1 A state model has three elements: definitions of each state and sub-state, a diagram of the states and the
transitions between states, and a state transition table. The diagram of the state model uses the Harel State Chart
notation. An overview of this notation is presented in an Appendix of SEMI E30. The definition of this notation is
presented in Science of Computer Programming 8, “Statecharts: A Visual Formalism for Complex Systems,” by D.
Harel, 1987
1
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1
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5 SEMI E87-0312 © SEMI 1999, 2012
7.2.2 State Model Requirements
7.2.2.1 The state models included in this Standard are a requirement for CMS compliance. A state model consists of
a state model diagram, state definitions, and a state transition table. All state transitions in this Standard, unless
otherwise specified, shall correspond to collection events. More explicitly, there must be a unique collection event
for each state transition.
7.2.2.2 Equipment must maintain state models for each of the required state models as defined in this Document.
Equipment shall maintain individual and unique state models for each logical entity instantiated or physical entity in
the equipment that has state models associated with it. The event identifier reported during a particular state
transition change for each of these state models shall be shared for all associated state models but unique for each
transition. For example, if the equipment has two load ports and the load port state model defines 10 transitions,
there must be exactly 10 event identifiers for each load port transfer state model but not 10 for each physical load
port. The information identifying the physical entity or logical entity undergoing the transition will be contained
within the associated event report.
7.2.2.3 A state model represents the host’s view of the equipment, and does not necessarily describe the internal
equipment operation. All CMS state model transitions shall be mapped sequentially into the appropriate internal
equipment collection events that satisfy the requirements of those transitions. In certain implementations, the
equipment may enter a state and have already satisfied all of the conditions required by the CMS state model for
transition to another state. In this case, the equipment makes the required transition without any additional actions in
this situation.
7.2.2.4 Some equipment may need to include additional sub-states other than those in this Standard. Additional sub-
states may be added, but shall not change the CMS defined state transitions. All expected transitions between CMS
states shall occur.
7.2.2.5 Transition tables are provided in conjunction with the state diagrams to explicitly describe the nature of each
state transition. A transition table contains columns for Transition number, Previous State, Trigger, New State,
Actions, and Comments. The ‘trigger’ (column 3) for the transition occurs while in the ‘previous’ state. The ‘actions’
(column 5) includes a combination of:
• Actions taken upon exit of the previous state,
• Actions taken upon entry of the new state, and
• Actions taken which are most closely associated with the transition.
7.2.2.6 When a state model is defined with multiple AND sub-states, the equipment may report all state entry
events with only one collection event. When conditional paths are defined in the state model, it is not necessary to
report any state transition(s) until a terminal state is reached at which time each transition used to reach that state is
reported.
Table 2 State Transition Table
Num Previous State Trigger New State Actions Comments
7.3 Services
7.3.1 Services are functions or methods that may be provided by either the equipment or the host. A service
message may be either a request message, which always requires a response, or a notification message that does not
require a response.
7.3.2 Service Message Description
7.3.2.1 A service message description table defines the parameters used in a service, as shown in the following
table:
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