ASMLSECSManual_SECS - CSDN文库

SECS

ASML

5星 · 超过95%的资源需积分: 49 783 浏览量更新于2023-05-30 评论 5 收藏 7.95MB PDF 举报

身份认证购VIP最低享 7 折!

领优惠券(最高得80元）

资源详情

资源评论

资源推荐

Product Documentation

Document ID

50495

Issue date

13 Dec 2011

Issue

Applies to:

TWINSCAN, XT:1950Hi, XT:19x0Gi, XT:1700Fi, XT:1450H/K, XT:1000H/K, XT:8xyH/K, XT:4x0H/K, SAWS

ASML Confidential

This document is provided for employees of ASML and for selected employees of ASML's customers and agents,

in order to assist them in efficient use of ASML products. The document must not be disclosed to third parties.

SECS I

NTERFACE

ANUAL

TWINSCAN - Release 5.0.0

Disclaimer This publication is subject to change without notice and contains confidential and proprietary information of ASML

Holding N.V. or its affiliates ("ASML").

This documentation is for the intended purpose only and for the use of the intended recipient only. Please retain

control of this documentation. It is not to be forwarded or distributed. Any unauthorized review, copying, use,

disclosure or distribution is strictly prohibited. The material herein is provided "AS-IS" and ASML makes no

warranty of any kind with regard to this material.

ASML shall not be liable for errors and omissions contained herein.

Trademarks ASML, ASM Lithography, TWINSCAN, PAS 5500, PAS 5000, SA 5200, ATHENA, QUASAR, IRIS, ILIAS,

FOCAL, CPL, DDL, Micralign, Micrascan, 3DAlign, 2DStitching, 3DMetrology, MaskTools, LithoServer,

LithoGuide, Scattering Bars, MaskWeaver, LithoCruiser, LithoCool, AGILE, ImageTuner, EFESE and the ASML

logo are trademarks of ASML Holding N.V. or affiliate companies.

The trademarks may be used either alone or in combination with a further product designation.

Starlith, AERIAL, AERIAL II and, AERIAL XP are trademarks of Carl Zeiss.

Nothing in this publication is intended to make representations with regard to whether any trademark is registered

or to suggest that any sign other than those mentioned should not be considered to be a trademark of ASML or of

any third party.

Translation

of Documents

If this document is in a language other than English, please read the following text carefully.

While we strive to ensure that the information is translated correctly, no warranty or guarantee, express or

implied, is given as to its accuracy or that it is as current as the English version. We accept no liability for any

errors or omissions. If there is any conflict or difference between the translated version of this document and its

English version, the English version is leading. If any part of the translated version is unclear, reference should be

made to the English version.

We shall not be liable for any damages (including, without limitation, damages for loss of business or loss of

profits) arising in contract, tort or otherwise from the use of or inability to use this document, or any material

contained in it, or from any action or decision taken as a result of using such material.

Feedback If you have any comments, questions or ideas regarding this book or its contents, please contact us at:

e-mail dl-pubweb@asml.com

post ASML

Publications Comments

PO box 324

5500 AH Veldhoven

The Netherlands

fax +31 40 268 3881

Please include:

• The issue date

• The ordering code number

• The page number, chapter or part number

• Your comment

• A description of any errors

• A proposal of any improvements.

Thank you for your support.

ASML Confidential

ABLE

ONTENTS

Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

Release Upgrade . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Chapter 1 SEMI Standards and Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

Semiconductor Equipment Communications Standard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

HSMS (SEMI E37) 23

SECS-II message content (SEMI E5) 24

Overview implemented SEMI Standards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

Compliance statements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

Chapter 2 Functional Behavior . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39

COMMUNICATIONS State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40

COMMUNICATIONS States 40

COMMUNICATIONS State Transitions 41

CONTROL State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42

CONTROL States 42

CONTROL State Transitions 43

SPOOLING State Model. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45

SPOOLING States 45

SPOOLING State Transitions 46

SYSTEM State Model. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48

SYSTEM States (SERVICE State sub-model) 48

SYSTEM State Transitions (SERVICE State sub-model) 49

SYSTEM State (RESERVATION State sub-model) 50

SYSTEM State (RESERVATION State sub-model) Transitions 50

PROCESS State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51

PROCESS States 52

PROCESS State (HALTING STATUS sub-module) 55

PROCESS State Transitions 56

PROCESS JOB QUEUE State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64

PROCESS JOB QUEUE Services 64

PROCESS JOB QUEUE States 65

PROCESS JOB QUEUE State Transitions 65

PROCESS JOB QUEUE Command Matrix 66

PROCESS JOB State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67

PROCESS JOB Services 69

PROCESS JOB States 70

PROCESS JOB State Transitions 72

PROCESS JOB Command Matrix 77

RETICLE LOAD PORT State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78

RETICLE LOAD PORT Services 78

RETICLE LOAD PORT TRANSFER State Model 79

RETICLE LOAD PORT TRANSFER States

RETICLE LOAD PORT TRANSFER State Transitions

RETICLE LOAD PORT ACCESS MODE State Model 81

RETICLE LOAD PORT ACCESS MODE States

RETICLE LOAD PORT ACCESS MODE State Transitions

RETICLE LOAD PORT RESERVATION State Model 82

RETICLE LOAD PORT RESERVATION States

ASML Confidential

Table of Contents

RETICLE LOAD PORT RESERVATION State Transitions

RETICLE LOAD PORT ASSOCIATION State Model 82

RETICLE LOAD PORT ASSOCIATION states

RETICLE LOAD PORT ASSOCIATION State Transitions

RETICLE LOAD PORT ASSOCIATION vs. RETICLE LOAD PORT RESERVATION 83

RETICLE LOAD PORT Command Matrix 84

WAFER STATE Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85

WAFER STATE States 85

WAFER STATE Transitions 86

WAFER LOCATION State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88

WAFER LOCATION States 88

WAFER LOCATION State Transitions 88

Wafer QUALIFICATION State Model. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89

WAFER QUALIFICATION States 89

WAFER QUALIFICATION State Transitions 89

WAFER CARRIER State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90

WAFER CARRIER ACCESSING States 90

WAFER CARRIER ACCESSING State Transitions 91

RETICLE STATE Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93

Reticle services 94

Service Queueing 95

RETICLE Related Factory Settings 96

RETICLE STATE States 96

RETICLE STATE State Transitions 98

RETICLE STATE Command Matrix 101

Reticle Location State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102

RETICLE POD State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103

RETICLE POD Related Factory Constants 103

RETICLE POD / SLOT Integrity 104

Reticle Pod State Models 104

RETICLE POD States 105

RETICLE POD State Transitions 108

Inventorise Pod Event 112

Tag Reader Events 112

RETICLE POD Busy / Not Busy Events 113

RETICLE POD Command Matrix 113

RETICLE POD Services 114

Alarm State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 117

ALARM States 117

ALARM State Transitions 117

EXCEPTION CONDITION State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 118

Exception Condition States 118

EXCEPTION CONDITION State Transitions 118

MESSAGE INPUT / OUTPUT State Model (Linked Litho) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 119

MESSAGE INPUT/OUTPUT States 119

MESSAGE INPUT/OUTPUT State Transitions 120

Chapter 3 TWINSCAN Objects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121

TWINSCAN objects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122

Chapter 4 Capabilities and Scenarios . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 125

Interface with the Host. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 126

Establish Communication (SEMI E30) 126

Capability

Scenarios

Online Identification (SEMI E30) 127

Capability

Scenario

Data Collection (SEMI E30) 127

Capability

Scenarios

Capability

Scenario