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Product Documentation
Document ID
50495
Issue date
13 Dec 2011
Issue
3
Applies to:
TWINSCAN, XT:1950Hi, XT:19x0Gi, XT:1700Fi, XT:1450H/K, XT:1000H/K, XT:8xyH/K, XT:4x0H/K, SAWS
ASML Confidential
This document is provided for employees of ASML and for selected employees of ASML's customers and agents,
in order to assist them in efficient use of ASML products. The document must not be disclosed to third parties.
SECS I
NTERFACE
M
ANUAL
TWINSCAN - Release 5.0.0
Copyright © 2011, ASML Holding N.V. (including affiliates). All rights reserved.
Disclaimer This publication is subject to change without notice and contains confidential and proprietary information of ASML
Holding N.V. or its affiliates ("ASML").
This documentation is for the intended purpose only and for the use of the intended recipient only. Please retain
control of this documentation. It is not to be forwarded or distributed. Any unauthorized review, copying, use,
disclosure or distribution is strictly prohibited. The material herein is provided "AS-IS" and ASML makes no
warranty of any kind with regard to this material.
ASML shall not be liable for errors and omissions contained herein.
Trademarks ASML, ASM Lithography, TWINSCAN, PAS 5500, PAS 5000, SA 5200, ATHENA, QUASAR, IRIS, ILIAS,
FOCAL, CPL, DDL, Micralign, Micrascan, 3DAlign, 2DStitching, 3DMetrology, MaskTools, LithoServer,
LithoGuide, Scattering Bars, MaskWeaver, LithoCruiser, LithoCool, AGILE, ImageTuner, EFESE and the ASML
logo are trademarks of ASML Holding N.V. or affiliate companies.
The trademarks may be used either alone or in combination with a further product designation.
Starlith, AERIAL, AERIAL II and, AERIAL XP are trademarks of Carl Zeiss.
Nothing in this publication is intended to make representations with regard to whether any trademark is registered
or to suggest that any sign other than those mentioned should not be considered to be a trademark of ASML or of
any third party.
Translation
of Documents
If this document is in a language other than English, please read the following text carefully.
While we strive to ensure that the information is translated correctly, no warranty or guarantee, express or
implied, is given as to its accuracy or that it is as current as the English version. We accept no liability for any
errors or omissions. If there is any conflict or difference between the translated version of this document and its
English version, the English version is leading. If any part of the translated version is unclear, reference should be
made to the English version.
We shall not be liable for any damages (including, without limitation, damages for loss of business or loss of
profits) arising in contract, tort or otherwise from the use of or inability to use this document, or any material
contained in it, or from any action or decision taken as a result of using such material.
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ASML Confidential
T
ABLE
OF
C
ONTENTS
Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Release Upgrade . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Chapter 1 SEMI Standards and Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Semiconductor Equipment Communications Standard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
HSMS (SEMI E37) 23
SECS-II message content (SEMI E5) 24
Overview implemented SEMI Standards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Compliance statements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Chapter 2 Functional Behavior . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
COMMUNICATIONS State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
COMMUNICATIONS States 40
COMMUNICATIONS State Transitions 41
CONTROL State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
CONTROL States 42
CONTROL State Transitions 43
SPOOLING State Model. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
SPOOLING States 45
SPOOLING State Transitions 46
SYSTEM State Model. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
SYSTEM States (SERVICE State sub-model) 48
SYSTEM State Transitions (SERVICE State sub-model) 49
SYSTEM State (RESERVATION State sub-model) 50
SYSTEM State (RESERVATION State sub-model) Transitions 50
PROCESS State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
PROCESS States 52
PROCESS State (HALTING STATUS sub-module) 55
PROCESS State Transitions 56
PROCESS JOB QUEUE State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
PROCESS JOB QUEUE Services 64
PROCESS JOB QUEUE States 65
PROCESS JOB QUEUE State Transitions 65
PROCESS JOB QUEUE Command Matrix 66
PROCESS JOB State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
PROCESS JOB Services 69
PROCESS JOB States 70
PROCESS JOB State Transitions 72
PROCESS JOB Command Matrix 77
RETICLE LOAD PORT State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
RETICLE LOAD PORT Services 78
RETICLE LOAD PORT TRANSFER State Model 79
RETICLE LOAD PORT TRANSFER States
RETICLE LOAD PORT TRANSFER State Transitions
RETICLE LOAD PORT ACCESS MODE State Model 81
RETICLE LOAD PORT ACCESS MODE States
RETICLE LOAD PORT ACCESS MODE State Transitions
RETICLE LOAD PORT RESERVATION State Model 82
RETICLE LOAD PORT RESERVATION States
ASML Confidential
4
Table of Contents
RETICLE LOAD PORT RESERVATION State Transitions
RETICLE LOAD PORT ASSOCIATION State Model 82
RETICLE LOAD PORT ASSOCIATION states
RETICLE LOAD PORT ASSOCIATION State Transitions
RETICLE LOAD PORT ASSOCIATION vs. RETICLE LOAD PORT RESERVATION 83
RETICLE LOAD PORT Command Matrix 84
WAFER STATE Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
WAFER STATE States 85
WAFER STATE Transitions 86
WAFER LOCATION State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
WAFER LOCATION States 88
WAFER LOCATION State Transitions 88
Wafer QUALIFICATION State Model. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
WAFER QUALIFICATION States 89
WAFER QUALIFICATION State Transitions 89
WAFER CARRIER State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
WAFER CARRIER ACCESSING States 90
WAFER CARRIER ACCESSING State Transitions 91
RETICLE STATE Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
Reticle services 94
Service Queueing 95
RETICLE Related Factory Settings 96
RETICLE STATE States 96
RETICLE STATE State Transitions 98
RETICLE STATE Command Matrix 101
Reticle Location State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102
RETICLE POD State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
RETICLE POD Related Factory Constants 103
RETICLE POD / SLOT Integrity 104
Reticle Pod State Models 104
RETICLE POD States 105
RETICLE POD State Transitions 108
Inventorise Pod Event 112
Tag Reader Events 112
RETICLE POD Busy / Not Busy Events 113
RETICLE POD Command Matrix 113
RETICLE POD Services 114
Alarm State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 117
ALARM States 117
ALARM State Transitions 117
EXCEPTION CONDITION State Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 118
Exception Condition States 118
EXCEPTION CONDITION State Transitions 118
MESSAGE INPUT / OUTPUT State Model (Linked Litho) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 119
MESSAGE INPUT/OUTPUT States 119
MESSAGE INPUT/OUTPUT State Transitions 120
Chapter 3 TWINSCAN Objects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121
TWINSCAN objects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122
Chapter 4 Capabilities and Scenarios . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 125
Interface with the Host. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 126
Establish Communication (SEMI E30) 126
Capability
Scenarios
Online Identification (SEMI E30) 127
Capability
Scenario
Data Collection (SEMI E30) 127
Capability
Scenarios
Capability
Scenario
ASML Confidential
Table of Contents
5
Equipment Constants (SEMI E30) 131
Capability
Scenarios
Alarm Management (SEMI E30) 132
Capability
Scenarios
Exception Management (SEMI E41) 134
Capability
Remote Control (SEMI E30) 134
Capability
Scenarios.
Processing Management (SEMI E40) 136
Capability
Scenarios
Material Handling (SEMI E87, E90 and E109) 140
Capability
Scenarios
Spooling (SEMI E30) 148
Capability
Scenarios
Equipment Terminal Services (SEMI E30) 149
Capability
Scenarios
Error messages (SEMI E30) 150
Capability
Message faults
Communication faults
Scenarios
Clock (SEMI E30) 152
Capability
Scenarios
Control (SEMI E30) 152
Capability
Scenarios
Process program management (SEMI E30) 154
Capability
Scenarios
Document Management (ASML specific) 155
Capability
Scenarios
Object Services (SEMI E39) 157
Capability
Scenarios
User interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 158
Remote operation window 158
Layout and description
Buttons
Terminal Services window 160
Incoming messages
Outgoing messages
Track Interface window 162
Layout and description
Buttons
SX Machine Constants . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163
Host Interface Settings 163
Track Interface Settings 164
General Settings 165
Compatibility Settings 166
Chapter 5 Data Dictionary. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 167
Data item dictionary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 168
Data items (A-C) 168
Data items (D-F) 174
Data items (G-K) 180
Data items (L-M) 182
Data items (N-P) 186
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