关于ALD介绍的参考文献
时间: 2024-01-15 07:05:24 浏览: 37
以下是一些关于ALD的参考文献,供您参考:
1. George K. Ramanath, Annelies Delabie, and Christophe Detavernier, "Atomic layer deposition: An overview," Materials Today, vol. 17, no. 5, pp. 236-246, 2014.
2. Steven M. George, "Atomic layer deposition: An overview," Chemical Reviews, vol. 110, no. 1, pp. 111-131, 2010.
3. H. J. B. M. Boer, W. M. M. Kessels, and M. C. M. van de Sanden, "Atomic layer deposition for nanotechnology: From advanced semiconductor manufacturing to emerging applications," Thin Solid Films, vol. 520, no. 7, pp. 1679-1705, 2012.
4. Tuomo Suntola, "Atomic layer epitaxy - a valuable tool for nanotechnology?," Surface Science, vol. 500, no. 1-3, pp. 329-342, 2002.
5. Roy G. Gordon, "Atomic layer deposition: From precursor chemistry to thin film growth," Journal of Vacuum Science & Technology A, vol. 20, no. 4, pp. S92-S100, 2002.
6. A. W. Ott, S. M. George, and J. W. Klaus, "Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process," Journal of Vacuum Science & Technology A, vol. 18, no. 4, pp. 2004-2014, 2000.
7. J. W. Elam, S. M. George, and S. A. Routkevitch, "Atomic layer deposition - moisture-assisted chemistry and the influence of surface hydroxyl groups," Journal of Physical Chemistry B, vol. 105, no. 37, pp. 8914-8924, 2001.
8. J. W. Elam, N. V. Myung, and S. M. George, "Atomic layer deposition of tungsten nitride films using tungsten hexafluoride and ammonia," Journal of Vacuum Science & Technology A, vol. 21, no. 2, pp. 371-375, 2003.
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